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吉林大学电子科学与工程学院, 集成光电子学国家重点实验室,吉林 长春,130023
收稿日期:2003-03-17,
修回日期:2003-05-08,
纸质出版日期:2004-07-20
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刘大力, 杜国同, 张源涛, 王新强, 杨天鹏, 杨晓天, 赵佰军, 杨洪军, 刘博阳, 张景林. ZnO薄膜的光抽运紫外激射[J]. 发光学报, 2004,25(4): 389-392
LIU Da-li, DU Guo-tong, ZHANG Yuan-tao, WANG Xin-qiang, YANG Tian-peng, YANG Xiao-tian, ZHAO Bai-jun, YANG Hong-jun, LIU Bo-yang, ZHANG Jing-lin. Optically Pumped Ultraviolet Lasing Property of ZnO Film[J]. Chinese Journal of Luminescence, 2004,25(4): 389-392
刘大力, 杜国同, 张源涛, 王新强, 杨天鹏, 杨晓天, 赵佰军, 杨洪军, 刘博阳, 张景林. ZnO薄膜的光抽运紫外激射[J]. 发光学报, 2004,25(4): 389-392 DOI:
LIU Da-li, DU Guo-tong, ZHANG Yuan-tao, WANG Xin-qiang, YANG Tian-peng, YANG Xiao-tian, ZHAO Bai-jun, YANG Hong-jun, LIU Bo-yang, ZHANG Jing-lin. Optically Pumped Ultraviolet Lasing Property of ZnO Film[J]. Chinese Journal of Luminescence, 2004,25(4): 389-392 DOI:
采用等离子体增强MOCVD方法生长出高质量的ZnO薄膜
并观察到了ZnO薄膜的光抽运紫外激射现象。在不同激发强度下进行了光荧光谱测量
发现紫外发光强度随着激发光强度的增加呈直线增强
证明此紫外发光峰来源于带边自由激子辐射复合。激发的激光器为3倍频YAG激光器
脉宽15ps
每秒10个脉冲。抽运光达到样品的光斑直径约为25μm
激射阈值为0.28μJ
利用光纤连接到CCD来探测接收激射光。在385~390nm之间的激射峰
其半峰全宽为0.03nm。所观察到的激射没有固定的方向
也就是说是往各个方向发射的。对于ZnO薄膜
由于我们并没有制作通常激光器的谐振腔
激射是通过晶粒强烈的散射导致的自形成谐振腔所产生的。
Recently much attention has been paid to short wavelength lasers for use in high density information storage.It is widely accepted that ZnO is one of the most promising materials for producing an ultraviolet laser at room temperature due to its wide direct band gap(E
g
=3.37eV) and large excitonic binding energy of 60meV.It has potential uses in optoelectronical systems such as light emitting diodes(LEDs)
photodetectors
electroluminecence devices and solar cells.To obtain high quality ZnO thin films a variety of techniques may be used such as molecular beam epitaxy(MBE)
metal organic chemical vapor deposition(MOCVD)
magnetron sputtering
pulsed laser deposition
and so on.Among them
MOCVD provides the advantage of growing high-quality films due to its versatility in controlling the various thermodynamic interactions.ZnO has not only the same crystal structure as GaN
but also a larger exciton binding energy of 60meV
which is 2.4 times that of GaN.This indicates that ZnO should be the most potential material to realize the next generation UV semiconductor laser.High quality ZnO films were deposited on c-Al
2
O
3
substrate by the plasma-assisted metal-organic chemical vapor deposition.Strong optically pumped ultraviolet(UV) emission was observed.PL spectra under different excitation powers were performed.The PL intensity as a function of the excitation power
it is obvious that the PL intensity is linearly dependent on the excitation power.This indicates that the dominant photoluminescence of the sample should be the excitonic radiative recombination at room temperature.Optically pumped UV lasing spectrum of ZnO film was observed.The samples were optically pumped by a frequency-tripled mode-locked Nd:YAG laser 355nm emission
with 10 Hz repetition rate
and 15 ps pulse width.The pump beam was focused to a spot with diameter of about 25μm on the surface of ZnO film.The threshold of lasing was as low as 0.28 μJ.From the lasing spectrum
we could find that the lasing peak has much narrow line-width less than 0.03nm.In this paper
high quality ZnO films were grown on c-Al
2
O
3
by MOCVD.Optimized growth condition was obtained by XRD and PL measurements.ZnO films were strongly c-oriented from XRD measurement.Optically pumped UV lasing was observed in all kinds of directions at room temperature.This was due to the self-formed resonance cavities.
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