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1. 中国科学院长春光学精密机械与物理研究所激发态物理重点实验室, 吉林, 长春, 130022
2. 吉林大学电子科学与工程学院, 吉林, 长春, 130023
收稿日期:2002-08-11,
修回日期:2003-01-14,
纸质出版日期:2003-05-20
移动端阅览
王蓟, 李剑, 邢华, 宁永强, 王立军. 采用溶胶-凝胶法制备nc-Si/SiO<sub>2</sub>薄膜[J]. 发光学报, 2003,24(3): 297-300
WANG Ji, LI Jian, XING Hua, NING Yong-qiang, WANG Li-jun. Preparation of nc-Si/SiO<sub>2</sub> Film with Sol-gel Method[J]. Chinese Journal of Luminescence, 2003,24(3): 297-300
溶胶凝胶方法是近年发展起来的一种新型的材料制备技术
被广泛的应用于薄膜、均匀超细粉末和陶瓷涂层的制备中。本文以正硅酸乙酯(TEOS)为原料
在乙醇共溶剂和盐酸催化剂条件下
采用溶胶凝胶方法制备含有纳米晶硅(nc-Si)的SiO
2
胶体溶液
通过旋涂法使溶剂迅速挥发而迅速凝胶化
经过适当温度的干燥和烧结制备了nc-Si/SiO
2
薄膜。探讨了胶体粘度、盐酸催化剂浓度、旋涂速度和时间对成膜质量的影响。给出了nc-Si/SiO
2
薄膜的扫描电镜图像和表征nc-Si/SiO
2
薄膜组分的能谱图。
Semiconducting silicon is the dominant material in microeletronics
which is a key for high technology
but it cannot emit light efficiently. It is necessary to develop Si based light emitting material for optoelectronic integrational device.The study of Si based light emitting materials is a new leading field in semiconductor optoelectronics and photonics. Bulk Si
however
is of little use for photonic devices owing to its indirect band gap and its poor radiative electron hole recombination.The light emitting of Si based quantum dot is attractive research direction. The nc-Si(Si quantum-dot)/SiO
2
is a promising light emitting material. The quantum confinement effect in nanocrystallites has proved to be highly effective for light emission. In this paper
the tetraethoxysilane (TEOS) precursor is hydrolyzed with ethanol as co solvent under various concentrations of hydrochloric acid catalyzer to prepare the SiO
2
solution through sol gel process.A nc-Si/SiO
2
film were fabricated by spin coating of such pre polymer solutions onto glass slides followed by aging and during of resultant gels. We give the SEM(scan-electronics microscope) of nc-Si/SiO
2
and energy spectra of nc-Si/SiO
2
.The effects of colloid viscosity
acid catalyzer concentrations
speed and time of spin coating on quality of film are revealed.In nc-Si/SiO
2
film
the particles (nc-Si) in nanocrystalline material have the size of about 1nm to 100nm
and there are several new effects upon conventional material among them e.g. micro-sized effect
quantum-size effect and macro quantum tunneling effect. It is just because of the existence of these effects nanocrystalline material shows out different characteristics on mechanics
thermodynamics
electricity and chemistry. So from the moment of its appearance
nanocrystalline material had been attracting more and more attentions of scientists on it.
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