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1. 北京大学物理系, 介观物理与人工微结构国家重点实验室 北京,100871
2. 南京大学物理系, 固体微结构国家重点实验室,江苏 南京,210093
收稿日期:2001-09-22,
修回日期:2001-10-20,
纸质出版日期:2002-03-20
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陈志忠, 秦志新, 沈波, 朱建民, 郑有炓, 张国义. 氮化蓝宝石衬底上GaN薄膜的微结构与光学性质[J]. 发光学报, 2002,23(2): 124-128
CHEN Zhi-zhong, QIN Zhi-xin, SHEN Bo, ZHU Jian-ming, ZHENG You-dou, ZHANG Guo-yi. Microstructural and Optical Properties of GaN Films on Nitrided Sapphire Substrates[J]. Chinese Journal of Luminescence, 2002,23(2): 124-128
陈志忠, 秦志新, 沈波, 朱建民, 郑有炓, 张国义. 氮化蓝宝石衬底上GaN薄膜的微结构与光学性质[J]. 发光学报, 2002,23(2): 124-128 DOI:
CHEN Zhi-zhong, QIN Zhi-xin, SHEN Bo, ZHU Jian-ming, ZHENG You-dou, ZHANG Guo-yi. Microstructural and Optical Properties of GaN Films on Nitrided Sapphire Substrates[J]. Chinese Journal of Luminescence, 2002,23(2): 124-128 DOI:
用透射电子显微镜(TEM)
X射线衍射(XRD)和光荧光谱(PL)等测量手段研究了GaN薄膜的微结构和光学性质。样品是用光辐射加热MOCVD在蓝宝石衬底上制备的。随着衬底氮化时间的增加
扩展缺陷的密度显著增加。在位错密度增加一个数量级时
XRD摇摆曲线半宽度(FWHM)由11″增加到15″
PL谱的黄光发射从几乎可忽略增加到带边发射强度的100倍。结合生长条件
我们对黄光与微结构的关系作了讨论。
The group-Ⅲ nitrides and their related ternary alloys have been becoming the most attractive material for light emitting diodes (LEDs) and laser diodes (LDs) in the UV and blue spectral range. However
the origins of the yellow luminescence (YL)
which is commonly observed in almost undoped and n-type GaN
remain unclear. The nature and the role of initial nitridation of sapphire surface and the generation of threading dislocation (TD) are ambiguous too. It is a possible way to resolve the above problems by studying the microstructures and optical properties combining the growth conditions. In this work
two kinds of GaN films were grown by MOCVD under different initial nitridation time (180 seconds for Sample A
and 90s for Sample B). The growth temperature is about 950℃. The cross-sectional transmission electron microscope (TEM) is performed near the GaN/sapphire interface. Corresponding the growth processes
there are three zones in the GaN layer: buffer layer
"faulted" zone and "sound" zone. There are "haystack-like" domains in the faulted zone
in which there are high density of extended defects. The thickness of the faulted zone is about 0.4μm. Just above this region
the defects density is reduced sharply
and the quality of the layer is improved
which is identified by electron diffraction (ED) patterns. In comparison
Sample A shows about an order lower density of extended defects than Sample B
their columnar diameter is larger and its ED pattern is sharper
too. The buffer layer of Sample B is more smooth than Sample A. The appropriate rougher morphology of the buffer layer may cause that the structural disorder between the high-temperature (HT) grown island and the buffer layer is accommodated by Frank and Shockley partial dislocations. However
the TD is likely to propagate into the HT GaN from the smooth surface of the buffer layer grown after extensively nitridation of substrate. According to the position and width of X-ray diffraction peaks of (0002) and (0004)
the size of crystalline grain
D and the residual strain could be calculated. The values of(D
ε
in
)of Sample A and B are (175nm
0.167%) and (90nm
0.141%)
respectively. Small size of crystalline grain may be advantageous to relieve the lattice and thermal mismatch stress
but it lead to higher density of extended defects. The width of GaN (0002) reflections of Sample A is 4min lower than that of Sample B. This result may be due to the lower screw TD. The higher density of screw TD may widen the GaN (0002) peak in X-ray rocking curve. In room temperature PL spectra
the ratio of band-edge emission intensity to YL one of Sample A is 3 orders larger than that of Sample B. Furthermore the YL in Sample B is stronger and has fine structure
while that in Sample A is nearly invisible in the PL spectrum. The GaN epilayer with high quality exhibits almost no YL emission. It is well known that the YL corresponds to the deformed crystal structure. We assigned that the screw TD and mixed TD are attributed to the YL referring to our XRD results.
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