The technology of deep level transient spectroscopy (DLTS) develops from the technology of measuring transient capacitance. Through the temperature scanning

it can rapidly

exactly describe the deep levels of the sample. And it has wide measuring range. So it has been becoming the popular measurement to study the deep level of the semiconductor. Zinc oxide is a self activated crystal with hexagonal wurtzite structure and has a gap of 3.3eV at room temperature.ZnO phosphor powders have been studied for several decades. Recently

ZnO films have attracted attention due to their wide applications in photoelectric materials such as surface acoustic wave guide

piezoelectric materials

transparent electrodes for some solar cells

and as a buffer layer for GaN. As most efforts focus on short wavelength semiconductor materials

stimulated and spontaneous ultraviolet emissions of ZnO thin films have been found. Comparing to the semiconductors used in conventional lasers

the UV emission of ZnO films has shorter wavelength. If a practical emitting device with short wavelength made by ZnO films could be fabricated

it must have exciting applications in compact disk recorder and other photoelectronics areas. In order to know the mechanism of its photoluminescence

the research in the properties of ZnO films is therefore important. In this article

we use deep level transient spectroscopy (DLTS) to study the ZnO/p Si heterostructure which was treated by two different temperatures (850℃

1 000℃) and to find its relationship to the photoluminescence .The results showed that the sample 1

#

(850℃ treated) has three obvious deep levels (

E

1

E

2

E

3

) and the sample 2

#

(1000℃ treated) has only

E

1

level. But the density of this level is higher than that of sample 1

#

. At the same time

the photoluminescence spectra of the samples were also measured. It is found that the sample 2

#

has higher density of photoluminescence because it has less levels and higher density of the level. Through the higher temperature (1000℃) treatment

some defect levels which affect the photoluminescence disappeared

and the crystal lattice become more integrated. So the treatment temperature of 1000℃ is efficient to improve the density of the photoluminescence of ZnO.