Microchannel plate(MCP)is a kind of vacuum electron-multiplier with beehive structure

which is invented in the late sixties of the last century.It is a two-dimension array

consisting of single channel electron-multiplier.As MCP has the characteristics of high gain

low noise

high resolution

low power

long life and the self-saturation effect

it is applied in charge particles

short-wave optical quantum and other detection devices and systems.A method of traditional Reduced Lead Silicate-Glass Microchannel Plate(RLSG-MCP)

its characteristics and the recent development are summarized briefly.The characteristics of secondary electron emitting of the materials are introduced

the structure characteristic and form technology of film continuous dynode of traditional MCP are given out.The method

that the new generation of film continuous dynode of twodimension electron-multiplier fabricated by semiconductor technology—Advanced Technology Microchannel Plate(AT-MCP)facture technology

is demonstrated emphatically.The detailed technology and experimental results are presented.Adopting UV-optoelectronic method

the MCP sample having a diameter of 25 mm is measured.When the working voltage is 400 V and the input current is 3×10

-11

A

the electron gain is 110.The coefficient of secondary electron emitting is calculated to be 1.8 accordingly.The electron microscope(picture)and the experimental curves are also shown.Finally

the advantage and development foreground of the new technology are pointed out.The materials of continuous dynode of the new technology are flexible and not restricted to the materials of basic body.The fabrication technology of the dynode is independent of the formation technology of the basic body.As the film continuous dynode of AT-MCP fabricated by semiconductor technology is concerned

the LPCVD and thermal oxidation technology is the optimal choice at present.The principle is right and the technology is feasible.Especially

the conductibility of continuous dynode fabricated by the new technology can be satisfied for the requirement easily

but the traditional technology can not exceed.