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1. 中国科学院长春光学精密机械与物理研究所, 应用光学国家重点实验室,吉林 长春,130033
2. 空军航空大学仿真所, 吉林, 长春, 130021
3. 吉林大学集成光电子国家重点实验室, 吉林, 长春, 130023
收稿日期:2004-08-25,
修回日期:2005-03-20,
纸质出版日期:2005-07-20
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鄂书林, 邓文渊, 王鹏飞, 李晓强, 马春生, 张大明, 崔占臣, 孙德贵. 聚合物微型谐振环波分复用器[J]. 发光学报, 2005,26(4): 538-541
E Shu-lin, DENG Wen-yuan, WANG Peng-fei, LI Xiao-qiang, MA Chun-sheng, ZHANG Da-ming, CUI Zhan-chen, SUN De-gui. Polymer Microring Resonator Wavelength Multiplexer[J]. Chinese Journal of Luminescence, 2005,26(4): 538-541
鄂书林, 邓文渊, 王鹏飞, 李晓强, 马春生, 张大明, 崔占臣, 孙德贵. 聚合物微型谐振环波分复用器[J]. 发光学报, 2005,26(4): 538-541 DOI:
E Shu-lin, DENG Wen-yuan, WANG Peng-fei, LI Xiao-qiang, MA Chun-sheng, ZHANG Da-ming, CUI Zhan-chen, SUN De-gui. Polymer Microring Resonator Wavelength Multiplexer[J]. Chinese Journal of Luminescence, 2005,26(4): 538-541 DOI:
研制出用于现代光通信密集波分复用(DWDM)系统的微型谐振环波分复用器(MRRWM)。微环与信道波导采用垂直耦合的方式
利用耦合模理论对器件参数进行了优化设计
设计出模板
并研制出符合器件光学性能要求的聚合物材料。利用反应离子刻蚀技术完成了硅基板上单级和八级的器件制作
波分复用器的中心波长为1.55μm
输出波长间隔Δλ=1.6nm
中心微环半径
R
=131.95μm
相邻微环半径差ΔR=500.0nm
器件测试结果表明实现了微环谐振输出。
Microring resonator is a original integrated optics device
which has developed for several years. Being a basic elements
microring resonator coulpled to a waveguide vertically offers high-quality factors
in large scale photoelectric integrated circuits
it can be used as filters
multiplexers
modulators
lasers and etc. This component has promising application in wavelength-division multiplexing(WDM) system because of their (simple) structure
easier fabrication and compactness.Most of the microring resonator devices have been fabricated using semiconductor material. In this work
we use polymer to fabricate microring device
polymer has a number of advantages over semiconductor-based devices
the first one is to deduce loss
the use of low refractive index polymers will significantly reduce scattering loss
the second advantage is to provide better coupling efficiency to optical fibers than previously de-(monstrated) semiconductor waveguides due to the low index and the large cross section of the polymer waveguide. Polymer materials also have other properties such like the excellent photoelectric characteristics
lower cost and simpler fabrication. The structure and working principle of microring resonant wavelength multiplexers (MRRWM) and device design are discussed. In microring resonators
the coupling coefficient plays an important role in determining the device characteristics. The coupling coefficient depends exponentially on the gap distance between the ring and the straight waveguide. We analyzed the transmission characteristics
designed a 8 channels microring (resonant) wavelength multiplexer(MRRWM)
the central wavelength of MRRWM is 1.55 μm
the wavelength spacing is 1.6 nm. To fabricate polymer waveguide in microring devices
the reactive ion etching (RIE) technique was used.The single channel and 8 channel polymer MRRWM with polymers based on silicon are fabricated. In the optical measurement
we used a tunable semiconductor laser with a tuning range from 1 530 nm to 1 610 nm
a digital optical power meter
and an optical spectrum analyzer were used to analyze the optical characters. A fiber-waveguide precision alignment system with infrared CCD camera was used for light coupling. In conclusion
polymer microring resonators were successfully fabricated by RIE technique
their optical (characters) were optimazed and analyzed.
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