Raman Scattering of GaN and Mg-doped GaN Films Grown by MOCVD
发光学报2005年26卷第2期 页码:229-232
作者机构:
1. 西安交通大学理学院,陕西 西安,710049
2. Department of Physics, Kansas State University, Manhattan, Kansas 66506, USA
作者简介:
基金信息:
国家自然科学基金资助项目(10474078)
DOI:
中图分类号:O433;O472;O765
收稿日期:2004-05-08,
修回日期:2004-12-11,
纸质出版日期:2005-03-20
稿件说明:
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王瑞敏, 陈光德, LIN J Y, JIANG H X. MOCVD生长的GaN和GaN:Mg薄膜的拉曼散射[J]. 发光学报, 2005,26(2): 229-232
WANG Rui-min, CHEN Guang-de, LIN J Y, JIANG H X. Raman Scattering of GaN and Mg-doped GaN Films Grown by MOCVD[J]. Chinese Journal of Luminescence, 2005,26(2): 229-232
王瑞敏, 陈光德, LIN J Y, JIANG H X. MOCVD生长的GaN和GaN:Mg薄膜的拉曼散射[J]. 发光学报, 2005,26(2): 229-232DOI:
WANG Rui-min, CHEN Guang-de, LIN J Y, JIANG H X. Raman Scattering of GaN and Mg-doped GaN Films Grown by MOCVD[J]. Chinese Journal of Luminescence, 2005,26(2): 229-232DOI:
Raman scattering spectra of GaN and Mg-doped GaN films grown by metal-organic chemical-vapor deposition (MOCVD) on sapphire substrate are investigated. Some weak peaks are also observed in two spectra besides the allowed E
2
and A
1
(LO) phonon modes in
Z
(X-)
Z
backscattering geometry. The origins of these peaks are discussed and the differences between two spectra are compared. Two peaks at 640 and 660cm
-1
are observed both in the spectra of GaN and Mg-doped GaN samples. The 640cm
-1
peak is attributed to an overtone process of the highest acoustic-phonon branch at the zone boundary (L point). The peak at 660cm
-1
is attributed to the optical-phonon branch at the zone boundary or the local vibrational mode induced by defect. In the spectrum of Mg-doped GaN sample there is a broad feature near the two peaks. It is suggested that the broad feature arises from the local vibrational mode of Mg-N bond which superposed on the two peaks mentioned above or arises from defect-induced broaden. Two additional peaks at 276cm
-1
and 376cm
-1
are also observed in the spectrum of Mg-doped GaN sample. The peak at 276cm
-1
is the local vibrational mode of Mg-N bond and the peak at 376cm
-1
is the local vibrational mode of impurity-defect complex. The frequency of E
2
mode in Mg-doped GaN shifted to low energy side compared with GaN sample
and located at 568cm
-1
at room temperature. This indicated that the relaxation of residual stress existed in Mg-doped sample. The stress relaxation is contributed to Mg-induced generation of dislocation. Furthermore
electron-phonon interaction also can induce frequency shift of E