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1. 中国科学院长春光学精密机械与物理研究所激发态物理重点实验室, 吉林, 长春, 130033
2. 长春理工大学高功率半导体激光国家重点实验室, 吉林, 长春, 130033
收稿日期:2004-03-05,
修回日期:2004-06-29,
纸质出版日期:2005-01-20
移动端阅览
刘云, 廖新胜, 秦丽, 王立军. 大功率半导体激光器叠层无氧铜微通道热沉[J]. 发光学报, 2005,26(1): 109-114
LIU Yun, LIAO Xin-sheng, QIN Li, WANG Li-jun. Oxygen-free Copper Microchannel Heat Sink of High Power Semiconductor Laser[J]. Chinese Journal of Luminescence, 2005,26(1): 109-114
建立了叠层无氧铜微通道热沉的散热模型
通过理论计算和近似分析
优化了微通道热沉的结构参数;在
t
=200μm
ω
c
=60μm
ω
f
=100μm
p
=2.02×10
6
Pa时
可获得最小热沉热阻Rthm=4.205×10
-3
K·cm
2
/W。根据优化结果
考虑微通道取向对液压降的影响
设计了一种新型大功率半导体激光器叠阵用五层结构叠层无氧铜微通道热沉
并结合实际工艺制备了无氧铜微通道热沉。在实际工作中
优化结果往往要跟实际工艺相结合
如优化所得的水压降2.02×10
6
Pa
这在实际工艺中较难实现。但在热沉实际工作的水压降条件下
热阻为4.982×10
-3
K·cm
2
/W
它能满足高功率激光器叠阵的需要。
Heat dissipation model of stacks oxygen-free copper microchannel heat sink was established in this paper. Structural parameters of microchannel heat sink were optimized through theoretical calculations and approximate analysis. Minimum thermal impedance of microchannel heat sink R
thm
=4.205×10
-3
K·cm
2
/W can be obtained when
t
=200μm
ω
c
=60μm
ω
f
=100μm
p=2.2×10
6
Pa. A new kind of five layers oxygen-free copper microchannel heat sink was designed for high power semiconductor laser stacks according to optimized results and influence of hydraulic pressure drop induced by tropism of microchannel. We fabricated the oxygen-free copper microchannel heat sink based on practical technology. The drop of water pressure of 2.02×10
6
Pa is not easy to realize in practice. Thermal impedance of 4.982×10
-3
K·cm
2
/W can fit the need of high power semiconductor laser stacks under the actual drop of operation water pressure.
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