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电子科技大学微电子与固体电子学院,四川 成都,610054
收稿日期:2004-09-15,
修回日期:2004-12-04,
纸质出版日期:2005-01-20
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高晖, 邓宏, 李燕. ZnO肖特基势垒紫外探测器[J]. 发光学报, 2005,26(1): 135-138
GAO Hui, DENG Hong, LI Yan. ZnO Schottky Barrier UV Photodetector[J]. Chinese Journal of Luminescence, 2005,26(1): 135-138
以p-Si(111)为衬底
用水热法首次制得六棱微管ZnO。并以此为有源区利用平面磁控溅射技术沉积得到Ag叉指状电极
从而制作了Ag/n-ZnO肖特基势垒结紫外探测器。对该紫外光探测器的暗电流和365nm波长光照下的光电流、光响应和量子效率进行了测试。测试结果表明:Ag和ZnO六棱管间已形成肖特基接触
其有效势垒高度为0.35eV。无光照时
暗电流很小
当用λ=365nm的光照射Ag/n-ZnO肖特基结时
在5
9V偏压时
光生电流分别为25.6
57.9μA。Ag/n-ZnO紫外探测器有明显的光响应特性和较高的量子效率
在 366nm波长处
光响应度达到最大值0.161A/W
量子效率为54.7%。
ZnO has been studied extensively for several applications
such as surface-acoustic-wave devices
ultraviolet light-emitting devices
laser diodes and gas sensors. Apart from these
high quality ZnO films are promising for UV photodetector application due to their wide and direct band gap and large photoresponse. Compared with photoconductive detector
Schottky type photodetectors are more attractive due to their high speed and low noise performance. Previously reported Schottky barrier UV sensitive photodiodes exhibited low quantum efficiency due to a large amount of recombination centers in the polycrystalline ZnO layers. In this paper
hexagonal microtube ZnO was firstly grown on single crystal p-Si(111) substrates by hydrothermal method. The Ag film electrodes was deposited on ZnO by planar magnetron sputtering
therefore Ag/n-ZnO UV photodetector was fabricated. The characteristic of dark- and photo-current of Ag/n-ZnO Schottky UV photodetector
the UV photoresponse and the quantum efficiency of the detector were also investigated. The results of testing indicate that there is a good Schottky behavior between Ag and microtube ZnO
and an effective barrier height is 0.35 eV. Dark current was very small
without illumination. Under illumination using monochromatic light with a wavelength of 365 nm
photogenerated current arrived at 25.6 and 57.9 μA
at a bias of 5 V and 9 V
respectively. A evident wide-range spectral responsivity and higher quantum efficiency of (Ag/n-ZnO) detector were observed. The maximum photo-responsibility of 0.161 A/W and the quantum efficiency of (54.7%) were obtained at wavelength of 366 nm. Therefore
the hexagonal microtube ZnO is suitable to apply for UV photodetector.
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