Cheng Buwen, Yu Jinzhong, Yu Zhuo, Wang Qiming, Chen Kunji, Huang Xinfan. DEPOSITION, CRYSTALLIZATION AND PHOTOLUMINESCENCE OF a-Si/SiO<sub>2</sub> MQW[J]. Chinese Journal of Luminescence, 1997,18(3): 217-222
Cheng Buwen, Yu Jinzhong, Yu Zhuo, Wang Qiming, Chen Kunji, Huang Xinfan. DEPOSITION, CRYSTALLIZATION AND PHOTOLUMINESCENCE OF a-Si/SiO<sub>2</sub> MQW[J]. Chinese Journal of Luminescence, 1997,18(3): 217-222DOI:
and a-Si by PECVD were studied under different conditions. a-Si/SiO
2
MQW (multi-quantum well) with high quality were deposited under suitable conditions. It was crystallized by laser annealing and silicon crystalline grain was formed. The grains of Si with size of 3.8nm was found if a-Si layer in the MQW structure was 4nm. Strong photoluminescence with three peaks from the grains was detected at 10K. The wavelengths of the peaks were 810nm