ZnS:Mn electroluminescent thin films were prepared by metal organic chemical vapour deposition(MOCVD)technology.ZnS:Mn thin films are cubic crystal phase.Crystal directions are identical and grains are bigger.The average size of ZnS:Mn grains is 150.7 nm.The micro-surface of the thin film is smooth.(100)main peak of hexagonal crystal phase has not been found on ZnS:Mn X-ray diffraction spectrum.So it is elimined that ZnS: Mn thin film prepared by MOCVD may be hexagonal crystal phase.Mn

2+

ions are uniform distributed in the thin film except for the edges. In which the content of Zn

2+

and Mn

2+

ions are higher.Possible reason is that the ions are piled up on dislocation

which is produced on edge areas during the initial and the final growth stage.In addition

the amount of the piled Zn

2+

Mn

2+

ions on the initial growth stage are more than ones on the final growth stage as a result of effection of the substrates and variability of stoichiometry.The piled layers are not beneficial to electroluminescence of ZnS:Mn thin film.It should be diminished by optimum experimental conditions.