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1. 中国科学技术大学物理系
2. 中国科学技术大学结构分析开放实验室 合肥,230026
收稿日期:1992-04-13,
纸质出版日期:1992-11-30
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方容川, 李清山, 崔景彪, 李庆红, 马玉蓉, 杨嘉玲. 多孔硅的光致发光和红外吸收光谱研究[J]. 发光学报, 1992,13(4): 275-280
Fang Rongchuan, Li Qingshan, Cui Jingbiao, Li Qinghong, Ma Yurong, Yang Jialing. PHOTOLUMINESCENCE AND INFRARED SPECTRO-SCOPY OF POROUS SILICON[J]. Chinese Journal of Luminescence, 1992,13(4): 275-280
用电化学腐蚀法制备出多孔硅系列样品.室温下具有明亮可见的光致发光.增大电解电流或延长腐蚀时间
发光光谱明显地“蓝移”;提高样品测量温度
发光光谱也明显地“蓝移”。红外吸收光谱表明多孔硅中除了硅丝骨架以外
还含有H、F及O等元素
随着腐蚀时间的增加
F和O原子的相对含量增加.实验结果表明
多孔硅在可见光区的发光现象是一种量子尺寸效应.
Porous silicon samples were prepared by electrochemical etching in HF-C
2
H
5
OH solution. Polished
n
type and
p
type (111) Si wafers with resistivities of 40-60Ω·cm
and 8-10Ω·cm
respectively
were used as substrates. A contact was made to the back of the wafer
which served as the anode and Pt as cathode. The typical etching current was 1-10mA.The samples show intense red colour luminescence excited by UV light or 488nm lino from Ar ion laser at room temperature. The PL band is rather broad with the full width at half maximum of about 0.31eV. The peak wavelength shifts from 770nm to 730nm as the etching time increases from one hour to 6 hours
keeping the etching current at 2mA. While increasing the current to 10mA
the peak position further shifts to 670nm. Such a large blue shift has also been observed when increasing measurement temperature. Infrared spectra show that there are Si-H
bond vibration absorptions at 2080-2100cm
-1
. 850-900cm
-1
and 640cm
-1
corresponding to the stretching
bending and wagging modes
respectively. Besides Si-H
n
bondings in porous Si
Si-F and Si-O bondings at 830cm
-1
and 1070-1120cm
-1
respectively
have also observed and the relative content of F and O atoms increases with the etching current.The structure of porous silicon consists of nanometre size and micrometer deep silicon columns produced by electrochemical ething. The visible luminescence in porous silicon is attributed to the radiative recombination of excitons confined at the quantum wires. The incorporation of H and F atoms in the sampler is considered as the terminatinators of the dangling bonds at the surfaces of the silicon wires
and may play an important role in keeping a high intense visible PL. Extending etching time or increasing oxygen content would thin the quantum wire
resulting in the blue shift of the PL spectra.
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