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中国科学院上海冶金研究所
纸质出版日期:1988-11-30
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张桂成, 沈彭年. 有源层掺杂剂对Ga<sub>1-x</sub>Al<sub>x</sub>As/GaAs双异质结发光管特性的影响[J]. 发光学报, 1988,9(4): 324-329
Zhang Guicheng, Shen Pengnian. DEPENDENCE OF CHARACTERISTICS OF GaAlAs/GaAs DH LEDS ON DOPANT OF ACTIVE LAYER[J]. Chinese Journal of Luminescence, 1988,9(4): 324-329
本文研究了由液相外延技术生长的GaAIAs/GaAs双异质结材料制成的发光管
有源层掺杂剂对器件特性的影响结果表明
器件结构和器件制作工艺相同的GaAIAs/GaAs发光管
有源层掺Si可获得较大的光输出功率
而频响特性
<
15MHz
波长在8700Å以上;对有源层掺Ge器件
光输出功率低于掺Si器件
而频响特性则
>
15MHz
波长可控制在8200Å~8500Å.深能级测量表明二者有不同的深能级位置
对掺Si(氧沾污)器件
E
c-
E
T≈0.29eV
而掺Ge器件
E
T-
E
v≈0.42eV.两种掺杂剂对有源层暗缺陷的影响尚无明显区别.
In this report the characteristics of GaAlAs/GaAs Burrus type DH LEDS for the active layer doped by Si or Ge are investigated. The GaAlAs/GaAs DH wafers used for fabrication of the LEDS were grown by LPE technique. The structure of a DH wafer consists of four layers. They are a n-Ga
1-
x
Al
x
As buffer layer (
x
=0.35)
a active layer doped by Si or Ge
a Ge doped p-Ga
1-
x
Al
x
As confined layer (
x
=0.35)
and a p-GaAs contact layer. The carrier concentration profile of the DH wafer was measured by the electrochemical
C-V
method. The device output power is about ≥2mW at 100mA.The experimental results are as follows:1. The output power of the GaAlAs/GaAs DH LEDS Si doped active layer are higher than that of Ge doped active layer.2. The cut-off frequence (
fc
) for the devices of Si doped active layer
fc
<
15MHz at 100mA
for the devices of Ge doped active layer
fc
>
15MHz.3. The emitting spectrum wavelength λ is≥8700Å and 8200Å~8500Å
for the Si doped and Ge doped devices
respectively.4. Using deep level measurement by DLTS and shot transient capacitance it was found that activation energy Δ
E
=0.29eV and 0.42eV for the Si doped and Ge doped devices respectively.5. The DLTS pattern of the devices for the Si or Ge doped does not show obvious difference.
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