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1. 中国科学院长春物理研究所
2. 英国曼彻斯特大学理工学院化学系
收稿日期:1986-07-10,
纸质出版日期:1986-11-30
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范广涵, J. I. Davies, J. O. Williams. ZnSe单晶薄膜的MOCVD法生长[J]. 发光学报, 1986,7(4): 383-392
Fan Guanghan, J. I. Davies J. O. Williams. EPITAXIAL GROWTH OF ZnSe LAYERS BY METAL-ORGANIC CHEMICAL VAPOUR DEPOSITION (MOCVD)[J]. Chinese Journal of Luminescence, 1986,7(4): 383-392
本文研究了常压MOCVD法制备宽禁带材料ZnSe的生长机制。通过经验公式和烟雾实验
从理论上和实验上分析了反应室的气流状态。观测了滞流层厚度及生长速率与位置、气流速度及衬底温度的关系。实现了反应器设计最优化
在热壁、常压、DEZ源的系统中也生长出高质量的ZnSe单晶外延层。
This paper describes the growth mechanism and the characteristics of ZnSe epilayers by Metal-Organic Chemical Vapour Deposition (MOCVD) at atmospheric pressure. Gas flow patterns
entrance effects and boundary layers within reactors have been investigated.The experimental techniques employed are TiO
2
smoke trace and it’s photogrammetry. The results are analysed in terms of accepted simplified theories of gas flow dynamics involving a group of dimensionless number-Re
Ra and Gr/Re
2
. The de-pendance of the stagnant layer thickness (δ) on the distance along substrate holder (
x
)
the gas velocity (
U
∞
) and the temperature (
T
) was experimentally observed.It tallys with the Berkman’s typical expression for the boundary layer thickness.The growth rate (
G
) has been studied as a function of distance along (
x
) and across (
z
) the susceptor. It is independent of the temperature between 450-530℃ for Diethylzinc (DEZ)and 280-390℃ for Dimethylzinc (DMZ) respectively. This shows that the deposition is controlled by the diffusion of reactants across the stagnant layer.
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