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中国科学院长春物理研究所
纸质出版:1983-02-28
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郑永成. 激光化学微加工技术[J]. 发光学报, 1983,4(1): 65-74
Zheng Yong-cheng. LASER PHOTOCHEMICAL TECHNIQUES FOR USE IN THE MICROMETER-SIZED PROCESSING[J]. Chinese Journal of Luminescence, 1983,4(1): 65-74
郑永成. 激光化学微加工技术[J]. 发光学报, 1983,4(1): 65-74 DOI:
Zheng Yong-cheng. LASER PHOTOCHEMICAL TECHNIQUES FOR USE IN THE MICROMETER-SIZED PROCESSING[J]. Chinese Journal of Luminescence, 1983,4(1): 65-74 DOI:
本文综述了激光化学微加工技术的原理及某些特性
并指出其可能的应用及发展前景.
The author gives a review on the principle and some characteristics of laser photochemical techniques for use in the micrometer-sized processing
and presents possible applications of the techniques to microelectronics and their developments in the future.
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