
浏览全部资源
扫码关注微信
中国科学院上海冶金研究所
纸质出版:1983-02-28
移动端阅览
黎锡强, 孙炳玉. GaAlAs快速边发光管发射端面沉积Al<sub>2</sub>O<sub>3</sub>抗反射层的研究[J]. 发光学报, 1983,4(1): 52-60
Li Xi-qiang, Sun Bing-yu. INVESTIGATION OF A1<sub>2</sub>O<sub>3</sub> ANTIREFLECTIVE COATING FOR GaAlAs HIGH SPEED LEDs[J]. Chinese Journal of Luminescence, 1983,4(1): 52-60
本文报导了在快速DH GsAs-GaAlAs边发光管发射端面上溅射沉积Al
2
O
3
抗反射层的研究
涂层厚度与输出光功率的提高密切相关
层厚接近λ/4值时
在200mA下光功率输出的提高达~80%.
In this paper the effect of antireflective coating (ARC) on the emitting facet on the light power output of edge emitting diode is reported.In high speed GaAs/GaAlAs DH-LEDs with sputtered A1
2
O
3
as AR coating on the front emitting facet
a remarkable increase in light power output has been achieved. The fabricated LEDs have two types of structure:normal edge emitter and edge emitter with optical waveguide structure.A conventional rf sputtering equipment with the source power of 3kW at 13.5 MC was used in preparing the A1
2
O
3
AR coating (refractive index 1.65~1.7). A high purity A1
2
O
3
disk was employed as a target.Before sputtering the high-purity Ar gas was further purified by passing it through molecular sieve 5A and hot Ti coils.The light power output of a normal edge emitter as a function of current density is plotted in Fig.3.At a driving current density of 4kA/cm
2
the light power increases from 370nW for the uncoated LED to 495uW for the same diode coated with~1890Å A1
2
O
3
.This corresponds to a light-power increase of~34%.
0
浏览量
48
下载量
0
CSCD
关联资源
相关文章
相关作者
相关机构
京公网安备11010802024621