LI Tong, ZHOU Yan-wen, WANG Yan-xue etc. Properties of ZnO/Ag/ZnO Transparent Conducting Thin Films Prepared by Magnetron Sputtering[J]. Chinese Journal of Luminescence, 2018,39(9): 1272-1279
LI Tong, ZHOU Yan-wen, WANG Yan-xue etc. Properties of ZnO/Ag/ZnO Transparent Conducting Thin Films Prepared by Magnetron Sputtering[J]. Chinese Journal of Luminescence, 2018,39(9): 1272-1279 DOI: 10.3788/fgxb20183909.1272.
Properties of ZnO/Ag/ZnO Transparent Conducting Thin Films Prepared by Magnetron Sputtering
ZnO/Ag/ZnO transparent conductive films were prepared on glass substrate by RF magnetron sputtering of zinc oxide(ZnO) powder and silver(Ag). When the thickness of ZnO was 30 nm
the thickness of Ag was changed to prepare three layers of transparent conductive films
and the influence of the thickness of Ag layer and the ratio between the layers on the photoelectric properties were studied. According to the ZnO/Ag ratio of 30:11
different thickness of three transparent conductive films were prepared
and the effect of multilayer thickness on the photovoltaic properties was researched. The results show that the surface of ZnO/Ag/ZnO with thickness of 8 nm and 11 nm are relatively flat
and have good degree of crystallinity with the maximum transmittance of 90% and 86% in the visible range and the sheet resistance of 6 /□ and 3.20 /□. The photoelectricity is excellent. When ZnO/Ag/ZnO three-layer films are prepared according to the ratio of 30:11
increasing the thickness of ZnO layer on the contrary enhances the light transmittance of Ag layer but decreases the overall optical layer thickness of the three-layer films.
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