Effect of Fabrication Technology of Polymer Optical Waveguide Amplifier Based on NaYF4:Er3+,Yb3+ Nanocrystals on Device Performance

XING Gui-chao; HUANG Ya-li; ZHANG Mei-ling; WANG Xi-bin; WANG Fei; ZHANG Da-ming

doi:10.3788/fgxb20183905.0681

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Effect of Fabrication Technology of Polymer Optical Waveguide Amplifier Based on NaYF₄:Er³⁺,Yb³⁺ Nanocrystals on Device Performance

更新时间：2020-08-12

- Effect of Fabrication Technology of Polymer Optical Waveguide Amplifier Based on NaYF₄:Er³⁺,Yb³⁺ Nanocrystals on Device Performance
- Chinese Journal of Luminescence Vol. 39, Issue 5, Pages: 681-686(2018)
- 作者机构：
  
  吉林大学电子科学与工程学院集成光电子学国家重点实验室, 吉林省光通信聚合物波导器件工程实验室, 吉林长春 130012
- 作者简介：
- 基金信息：
  
  Supported by National Natural Science Foundation of China (61475061,61575076,6140507
- DOI：10.3788/fgxb20183905.0681
  CLC： O482.31
- Received：05 September 2017，
  
  Revised：13 December 2017，
  
  Published Online：05 January 2018，
  
  Published：05 May 2018
- 稿件说明：
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邢桂超, 黄雅莉, 张美玲等. 制备工艺对掺杂NaYF4:Er3+,Yb3+发光纳米晶的聚合物光波导放大器性能的影响[J]. 发光学报, 2018,39(5): 681-686

XING Gui-chao, HUANG Ya-li, ZHANG Mei-ling etc. Effect of Fabrication Technology of Polymer Optical Waveguide Amplifier Based on NaYF4:Er3+,Yb3+ Nanocrystals on Device Performance[J]. Chinese Journal of Luminescence, 2018,39(5): 681-686
邢桂超, 黄雅莉, 张美玲等. 制备工艺对掺杂NaYF4:Er3+,Yb3+发光纳米晶的聚合物光波导放大器性能的影响[J]. 发光学报, 2018,39(5): 681-686 DOI： 10.3788/fgxb20183905.0681.

XING Gui-chao, HUANG Ya-li, ZHANG Mei-ling etc. Effect of Fabrication Technology of Polymer Optical Waveguide Amplifier Based on NaYF4:Er3+,Yb3+ Nanocrystals on Device Performance[J]. Chinese Journal of Luminescence, 2018,39(5): 681-686 DOI： 10.3788/fgxb20183905.0681.

摘要

制备了NaYF

：Er

，Yb

纳米晶，表征了纳米晶的形貌，通过物理掺杂的方式将纳米粒子掺杂到SU-8中作为光波导放大器的芯层材料，优化了波导放大器的尺寸，利用旋涂、刻蚀等工艺，在二氧化硅衬底上制备了光波导放大器。实验中用光漂白法和湿法刻蚀两种方法制备光波导放大器，分别给出了两种方法制备的器件的结构、工艺流程、光场模拟结果，并对两种方法制备的器件的放大特性进行了测试。测试结果表明，当980 nm波长的泵浦光功率为241 mW且1 550 nm波长的信号光功率为0.1 mW时，使用湿法刻蚀法制备的放大器得到2.7 dB的相对增益。当980 nm波长的泵浦光功率为235 mW且1 550 nm波长的信号光功率为0.1 mW时，使用光漂白法制备的放大器得到4.5 dB的相对增益。根据以上测试结果，分析了两种工艺对器件性能的影响。

Abstract

NaYF

:Er

nanocrystals were synthesized and the morphology of nanocrystals was characterized. The nanocrystals were doped into SU-8 as the core material of the optical waveguide amplifier by physical doping method. The size of the waveguide amplifier was optimized. Polymer optical waveguide amplifiers were fabricated on a silica substrate by spin coating

photolithography and ICP etching. In the experiment

the optical waveguide amplifier was prepared by two methods:light bleaching and wet etching. The amplification characteristics of the devices prepared by the two methods are tested. The amplifier prepared using the wet etching method achieves a relative gain of 2.7 dB at 1 550 nm when the pump power is 241 mW and the signal light power is 0.1 mW. The amplifier prepared using the photobleaching method obtains a relative gain of 4.5 dB at 1 550 nm for 235 mW pump power and 0.1 mW signal power. Based on the above test results

the effects of the two processes on the device performance were analyzed.

关键词

Keywords

references

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