Surface-enhanced Raman Scattering Based on Silicon Nanostructures

CUI Shao-hui; FU Ting-zhao; WANG Huan; XIA Yang; LI Chao-bo

doi:10.3788/fgxb20183904.0481

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Surface-enhanced Raman Scattering Based on Silicon Nanostructures

更新时间：2020-08-12

- Surface-enhanced Raman Scattering Based on Silicon Nanostructures
- Chinese Journal of Luminescence Vol. 39, Issue 4, Pages: 481-487(2018)
- 作者机构：
  
  1. 中国科学院大学北京,100049
  2. 中国科学院微电子研究所北京,100029
  3. 集成电路测试技术北京市重点实验室北京,100088
- 作者简介：
- 基金信息：
  
  Supported by Program of Beijing Municipal Commission of Science and Technology (Z161
- DOI：10.3788/fgxb20183904.0481
  CLC： O657.37
- Received：25 July 2017，
  
  Revised：19 August 2017，
  
  Published Online：21 August 2017，
  
  Published：05 April 2018
- 稿件说明：
移动端阅览
崔绍晖, 符庭钊, 王欢等. 纳米结构Si表面增强拉曼散射特性研究[J]. 发光学报, 2018,39(4): 481-487

CUI Shao-hui, FU Ting-zhao, WANG Huan etc. Surface-enhanced Raman Scattering Based on Silicon Nanostructures[J]. Chinese Journal of Luminescence, 2018,39(4): 481-487
崔绍晖, 符庭钊, 王欢等. 纳米结构Si表面增强拉曼散射特性研究[J]. 发光学报, 2018,39(4): 481-487 DOI： 10.3788/fgxb20183904.0481.

CUI Shao-hui, FU Ting-zhao, WANG Huan etc. Surface-enhanced Raman Scattering Based on Silicon Nanostructures[J]. Chinese Journal of Luminescence, 2018,39(4): 481-487 DOI： 10.3788/fgxb20183904.0481.

摘要

为了实现低成本高灵敏度的表面增强拉曼散射效应，制备了一种基于硅表面纳米结构的表面增强拉曼散射效应（SERS）衬底。首先利用低能反应离子注入的方法对单晶硅进行表面处理，制作高陡值度的墙壁结构。然后采用电子束蒸发的方式在硅片表面蒸镀银膜，高密度的银纳米点阵列出现在侧壁表面，形成大量的热点。实验采用罗丹明6G（R6G）作为探针分子进行表征，发现获得最强拉曼信号的银膜厚度为40 nm，R6G的探测极限能达到10

-14

mol/L；同时分析衬底的重复性和稳定性，发现在614 cm

-1

和1 650 cm

-1

处的拉曼信号特征峰的相对标准偏差分别达到12.3%和14.3%，保存一个月的衬底测得的拉曼信号强度保持不变。本研究提供了一种操作简单、成本低的制备高灵敏度增强拉曼效应衬底的方法，制备的衬底具有高信号可重复性和高稳定性的优点。

Abstract

In order to achieve high-sensitivity surface-enhanced Raman scattering(SERS) at a low cost

a kind of SERS substrate based on the nanostructures of silicon was fabricated. The monocrystalline silicon was treated with low-energy reactive ion implantation. Highly steep nanostructures were fabricated on the surface of the monocrystalline silicon. Then the treated silicon was decorated with silver employing the way of electron beam evaporation. Ag nanoparticles and hot spots formed on the side walls of nanostructures. The substrates with 40 nm-thickness silver obtain the most powerful Raman signal and reach a limit of 10

-14

mol/L by employing the R6G as the probe molecule. We also analyze the stability and repeatability of the substrates. The characteristic peaks located at 614 cm

-1

and 1 650 cm

-1

own relative standard deviation of 12.3% and 14.3%

respectively. The substrates can obtain the characteristic signal of R6G as well after a month. This method is simple and cost-effective and the demonstrated SERS substrates offer the advantages of high-sensitivity

high-repeatability and high-stability.

关键词

Keywords

references

BELL S E, SIRIMUTHU N M. Quantitative surface-enhanced Raman spectroscopy[J]. Chem. Soc. Rev., 2008, 37(5):1012-1024.

FAN M, ANDRADE G F, BROLO A G. A review on the fabrication of substrates for surface enhanced Raman spectroscopy and their applications in analytical chemistry[J]. Analy. Chim. Acta, 2011, 693(1-2):7.

KNEIPP K, WANG Y, KNEIPP H, et al.. Single molecule detection using surface-enhanced Raman scattering (SERS)[J]. Phys. Rev. Lett., 1997, 78(9):1667.

SHARMA B, FRONTIERA R R, HENRY A I, et al.. SERS:materials, applications, and the future[J]. Mater. Today, 2012, 15(1-2):16-25.

CHEN J, HUANG M, ZOU Y, et al.. Multiple myeloma detection based on blood plasma surface-enhanced Raman spectroscopy using a portable Raman spectrometer[J]. Laser Phys. Lett., 2016, 13(10):105601.

FAZIO B, D'ANDREA C, FOTI A, et al.. SERS detection of biomolecules at physiological pH via aggregation of gold nanorods mediated by optical forces and plasmonic heating[J]. Sci. Rep., 2016, 6:26952.

STREHLE K R, CIALLA D, RSCH P, et al.. A reproducible surface-enhanced Raman spectroscopy approach. Online SERS measurements in a segmented microfluidic system[J]. Anal. Chem., 2007, 79(4):1542-1547.

BRAUN G, PAVEL I, MORRILL A R, et al.. Chemically patterned microspheres for controlled nanoparticle assembly in the construction of SERS hot spots[J]. J. Am. Chem. Soc., 2007, 129(25):7760-7761.

NGO H T, WANG H N, FALES A M, et al.. DNA bioassay-on-chip using SERS detection for dengue diagnosis[J]. Analyst, 2014, 139(22):5655-5659.

BARBILLON G, SANDANA V E, HUMBERT C, et al.. Study of Au coated ZnO nanoarrays for surface enhanced Raman scattering chemical sensing[J]. J. Mater. Chem. C, 2017, 5(14):3528-3535.

DING S Y, YI J, LI J F, et al.. Nanostructure-based plasmon-enhanced Raman spectroscopy for surface, analysis of materials[J]. Nat. Rev. Mater., 2016, 1(6):1-16.

RAVEENDRAN P, FU J, WALLEN S L. Completely "green" synthesis and stabilization of metal nanoparticles[J]. J. Am. Chem. Soc., 2003, 125(46):13940-13941.

TURKEVICH J, STEVENSON P C, HILLIER J. The formation of colloidal gold[J]. J. Phys. Chem., 1953, 57(7):670-673.

NUNTAWONG N, HORPRATHUM M, EIAMCHAI P, et al.. Surface-enhanced Raman scattering substrate of silver nanoparticles depositing on AAO template fabricated by magnetron sputtering[J]. Vacuum, 2010, 84(12):1415-1418.

AHN H J, THIYAGARAJAN P, JIA L, et al.. An optimal substrate design for SERS:dual-scale diamond-shaped gold nano-structures fabricated via interference lithography[J]. Nanoscale, 2013, 5(5):1836-1842.

NIEN L W, CHAO B K, LI J H, et al.. Optimized sensitivity and electric field enhancement by controlling localized surface plasmon resonances for bowtie nanoring nanoantenna arrays[J]. Plasmonics, 2015, 10(3):457-463.

ZHANG Y L, CHEN Q D, XIA H, et al.. Designable 3D nanofabrication by femtosecond laser direct writing[J]. Nano Today, 2010, 5(5):435-448.

FANG Y, SEONG N H, DLOTT D D. Measurement of the distribution of site enhancements in surface-enhanced Raman scattering[J]. Science, 2008, 321(5887):388-392.

WANG H H, LIU C Y, WU S B, et al.. Highly Raman-enhancing substrates based on silver nanoparticle arrays with tunable sub-10 nm gaps[J]. Adv. Mater., 2006, 18(4):491-495.

ZHANG K, ZENG T, TAN X, et al.. A facile surface-enhanced Raman scattering (SERS) detection of rhodamine 6G and crystal violet using Au nanoparticle substrates[J]. Appl. Surf. Sci., 2015, 347:569-573.

DU Y, SHI L, HE T, et al.. SERS enhancement dependence on the diameter and aspect ratio of silver-nanowire array fabricated by anodic aluminium oxide template[J]. Appl. Surf. Sci., 2008, 255(5):1901-1905.

ZHU C H, MENG G W, ZHENG P, et al.. A hierarchically ordered array of silver-nanorod bundles for surface-enhanced Raman scattering detection of phenolic pollutants[J]. Adv. Mater., 2016, 28(24):4871-4876.

HUANG J A, ZHANG Y L, ZHAO Y, et al.. Superhydrophobic SERS chip based on a Ag coated natural taro-leaf[J]. Nanoscale, 2016, 8(22):11487.

XU T T, HUANG J A, HE L F, et al.. Ordered silicon nanocones arrays for label-free DNA quantitative analysis by surface-enhanced Raman spectroscopy[J]. Appl. Phys. Lett., 2011, 99(15):1052-5519.

CHEN Y, KANG G, SHAH A, et al.. Improved SERS Intensity from silver-coated black silicon by tuning surface plasmons[J]. Adv. Mater. Interf., 2014, 1(1):176-182.

邹志超, 李超波, 罗军, 等. 等离子体浸没离子注入技术在FinFET掺杂中的应用[J]. 半导体技术, 2014, 39(8):596-599. ZOU Z C, LI C B, LUO J, et al.. The application of plasma immersion ion implantation technique in FinFET doping[J]. Semicond. Technol., 2014, 39(8):596-599. (in Chinese)

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