Optimum Design of Silicon-based Metal-semiconductor-metal Photodetector with Subwavelength Metal Grating

QIAO Jing; XIE Sheng; MAO Lu-hong; CONG Jia; DONG Wei-feng

doi:10.3788/fgxb20183903.0363

您当前的位置：

首页 >

文章列表页 >

Optimum Design of Silicon-based Metal-semiconductor-metal Photodetector with Subwavelength Metal Grating

更新时间：2020-08-12

- Optimum Design of Silicon-based Metal-semiconductor-metal Photodetector with Subwavelength Metal Grating
- Chinese Journal of Luminescence Vol. 39, Issue 3, Pages: 363-368(2018)
- 作者机构：
  
  1. 天津大学微电子学院天津市成像与感知微电子技术重点实验室天津,300072
  2. 天津大学电气自动化与信息工程学院天津,300072
- 作者简介：
- 基金信息：
  
  Supported by National Natural Science Foundation of China(61474081,11673019)
- DOI：10.3788/fgxb20183903.0363
  CLC： TN202
- Received：11 July 2017，
  
  Revised：23 August 2017，
  
  Published Online：28 August 2017，
  
  Published：05 March 2018
- 稿件说明：
移动端阅览
乔静, 谢生, 毛陆虹等. 吸收增强的光栅型金属-半导体-金属光电探测器的优化设计[J]. 发光学报, 2018,39(3): 363-368

QIAO Jing, XIE Sheng, MAO Lu-hong etc. Optimum Design of Silicon-based Metal-semiconductor-metal Photodetector with Subwavelength Metal Grating[J]. Chinese Journal of Luminescence, 2018,39(3): 363-368
乔静, 谢生, 毛陆虹等. 吸收增强的光栅型金属-半导体-金属光电探测器的优化设计[J]. 发光学报, 2018,39(3): 363-368 DOI： 10.3788/fgxb20183903.0363.

QIAO Jing, XIE Sheng, MAO Lu-hong etc. Optimum Design of Silicon-based Metal-semiconductor-metal Photodetector with Subwavelength Metal Grating[J]. Chinese Journal of Luminescence, 2018,39(3): 363-368 DOI： 10.3788/fgxb20183903.0363.

摘要

针对可见光通信对硅基光电探测器高响应度的要求，本文利用亚波长金属光栅的异常光学透射现象，提出一种增强与硅基CMOS工艺兼容的金属-半导体-金属光电探测器吸收的方法。采用时域有限差分法，详细分析了光栅周期、光栅高度和狭缝宽度对探测器吸收性能的影响，证明了类法布里-珀罗共振和表面等离子体激元是吸收增强的物理起源。对于波长615 nm的红光通信而言，探测器金属光栅的最佳周期、最佳高度和最佳狭缝宽度分别为580，91，360 nm。与没有亚波长金属光栅结构的探测器相比，本文设计的探测器吸收系数提高了32%。本文研究的MSM探测器结构与CMOS工艺完全兼容，有望在可见光通信芯片中得到实际应用。

Abstract

To meet the requirement of high responsivity of silicon-based photodetector in visible light communication (VLC)

a novel silicon-based metal-semiconductor-metal photodetector utilizing the abnormal optical transmission of subwavelength metal grating was proposed. The effects of grating height

grating period and slit width on the absorptive performance of the photodetector were analyzed in detail by using the method of finite difference time domain. The simulation results indicate that the absorption enhancement was improved by the Fabry-Perot resonance and the surface plasmon polariton. For the VLC system with a wavelength of 615 nm

the optimum period

the optimum height and the optimum slit width of the metal grating are 580

360 nm

respectively. The absorption efficiency of the designed detector was 32% higher than that of the detector without metal grating. Since the proposed photodetector is based on standard CMOS process

it has potential application in the visible light communication.

关键词

Keywords

references

关伟鹏, 文尚胜, 黄伟明, 等. 基于神经网络的可见光通信接收系统的研究[J]. 中国激光, 2015, 42(11):113-120. GUAN W P, WEN S S, HUANG W M, et al.. Research on visible optical communication receiving system based on neural network[J]. Chin. J. Laser, 2015, 42(11):113-120. (in Chinese)

TIWARI S V, SEWAIWAR A, CHUNGY H. Smart home multi-device bidirectional visible light communication[J]. Photon. Network Commun., 2017, 33(1):52-59.

FANG J, YANG Z, LONG S, et al.. High speed indoor navigation system based on visible light and mobile phone[J]. IEEE Photon. J., 2017, 9(2):8200711-1-11.

UEMA H, MATSUMURAL T, SAITO S, et al.. Research and development on underwater visible light communication systems[J]. Electron. Commun. Jpn., 2015, 98(3):9-13.

HUANG J M, WANG C C, CHIU Y J. A CMOS opto-electronic single chip using the hybrid scheme for optical receivers[J]. Microwave Opt. Technol. Lett., 2008, 50(9):2430-2434.

AHMAD W, TORMANEN M, SJOLAND H. Photodiodes in deep submicron CMOS process for fully integrated optical receivers[C]. IEEE European Solid-State Device Research Conference, 2013:135-138.

BRANDL P, ENMER P, JUKI T, et al.. OWC using a fully integrated optical receiver with large-diameter APD[J]. IEEE Photon. Technol. Lett., 2015, 27(5):482-485.

ZUMUUKHOROL M, KHURELBAATAR Z, YUK S H, et al.. Effects of finger dimension on low-frequency noise and optoelectronic properties of Ge metal-semiconductor-metal photodetectors with interdigitated Pt finger electrodes[J]. Microelectron. Reliab., 2017, 69:60-65.

江孝伟, 武华. 一维增透亚波长光栅的研究[J]. 发光学报, 2017, 38(2):177-181. JIANG X W, WU H. Study on one-dimensional enhancement of subwavelength gratings[J]. Chin. J. Lumin., 2017, 38(2):177-181. (in Chinese)

郝宇, 孙晓红, 孙燚, 等. 基于光栅结构的砷化镓高效率吸收层设计[J]. 发光学报, 2013, 34(6):769-775. HAO Y, SUN X H, SUN Y, et al.. Design of gallium arsenide high efficiency absorptive layer based on grating structure[J]. Chin. J. Lumin., 2013, 34(6):769-775. (in Chinese)

SEIFOURI M, SHARAF R. Symmetric metal nanogratings and horned shape extended pads to enhance light transmission of plasmonic metal-semiconductor-metal photodetector[J]. Opt. Quant. Electron., 2017, 49(4):136.

CHENG Y, IKKU Y, TAKENAKA M, et al.. Low-dark-current waveguide InGaAs metal-semiconductor-metal photodetector monolithically integrated with InP grating coupler on Ⅲ-Ⅴ CMOS photonics platform[J]. Jpn. J. Appl. Phys., 2016, 55(4S):04EH01-1-4.

MASOULEH F, DAS N, ROZATI S M. Optimal subwavelength design for efficient light trapping in central slit of plasmonics-based metal-semiconductor-metal photodetector[J]. Opt. Quant. Electron., 2015, 47(6):1477-1485.

KARAR A, TAN C L, ALAMEH K, et al.. Metal nano-grating optimization for higher responsivity plasmonic-based GaAs metal-semiconductor-metal photodetector[J]. J. Lightwave Technol., 2013, 31(7):1088-1092.

PALIK E D. Handbook of Optical Constants of Solids[M]. New York:Academic Press, 1985.

PORTO J A, GARCIA-VIDAL F J, PENDRY J B. Transmission resonances on metallic gratings with very narrow slits[J]. Phys. Rev. Lett., 1999, 83(14):2845-2848.

张平, 董亮, 张雅鑫, 等. 亚波长金属光栅的衍射辐射特性研究[J]. 光子学报, 2013, 42(5):537-542. ZHANG P, DONG L, ZHANG Y X, et al.. Diffraction radiation of subwavelength metallic grating[J]. Acta Photon. Sinica, 2013, 42(5):537-542. (in Chinese)

BAMES W L, DEREUX A, EBBESEN T W. Surface plasmon subwavelength optics[J]. Nature, 2003, 424(6950):824-830.

RAHMAN A T, MAJEWSKI P, VASILEV K. Extraordinary optical transmission:coupling of the Wood-Rayleigh anomaly and the Fabry-Perot resonance[J]. Opt. Lett., 2012, 37(10):1742-1744.

Views

321

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Deep UV Detection： from Single-crystalline MgZnO to Amorphous Ga₂O₃

Photodetector with Broadband-narrowband Dual-function Detection Mode

Microcavity Effect on Modulation Bandwidth Characteristics in Organic Light-emitting Diodes

Response Wavelength Characterization of Ag-doped Chalcogenide Glass Photodetectors

Optimization Methods for UAVs to Search Light Source in VLC

Related Author

LIANG Huili

ZHU Rui

DU Xiaolong

MEI Zengxia

JIANG Yan

GAO Feng

LI Lin

LI Bin

Related Institution

Institute of Physics， Chinese Academy of Sciences

Songshan Lake Materials Laboratory

Key Laboratory for Photonic and Electronic Bandgap Materials， Ministry of Education， School of Physics and Electronic Engineering， Harbin Normal University

State Key Laboratory of Integrated Optoelectronics， Jilin University Region， College of Electronic Science and Engineering， Jilin University

Physics Department， Harbin Institute of Technology

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176862 Email：fgxbt@126.com
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰