Investigation and Preparation of Highly Reflective One Dimensional Photonic Crystal Based on Silicon Thin Films

CHEN Pei-zhuan; YU Li-yuan; NIU Ping-juan; ZHANG Jian-jun; HOU Guo-fu

doi:10.3788/fgxb20173810.1403

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Investigation and Preparation of Highly Reflective One Dimensional Photonic Crystal Based on Silicon Thin Films

更新时间：2020-08-12

- Investigation and Preparation of Highly Reflective One Dimensional Photonic Crystal Based on Silicon Thin Films
- Chinese Journal of Luminescence Vol. 38, Issue 10, Pages: 1403-1408(2017)
- 作者机构：
  
  1. 天津工业大学电气工程与自动化学院, 电工电能天津市重点实验室, 大功率半导体照明应用系统教育部工程中心天津,300387
  2. 南开大学光电子薄膜器件与技术研究所, 光电子薄膜器件与技术天津市重点实验室, 光学信息技术科学教育部重点实验室天津,300071
- 作者简介：
- 基金信息：
  
  Supported by National Natural Science Foundation of China(61176060,61404074,61504069,61377031,61605145);Natural Science Foundation of Tianjin City(14JCQNJC02100)。
- DOI：10.3788/fgxb20173810.1403
  CLC： O472+.3
- Received：14 March 2017，
  
  Revised：24 April 2017，
  
  Published Online：07 July 2017，
  
  Published：05 October 2017
- 稿件说明：
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陈培专, 于莉媛, 牛萍娟等. 高反射率硅基薄膜一维光子晶体的研究制备[J]. 发光学报, 2017,38(10): 1403-1408

CHEN Pei-zhuan, YU Li-yuan, NIU Ping-juan etc. Investigation and Preparation of Highly Reflective One Dimensional Photonic Crystal Based on Silicon Thin Films[J]. Chinese Journal of Luminescence, 2017,38(10): 1403-1408
陈培专, 于莉媛, 牛萍娟等. 高反射率硅基薄膜一维光子晶体的研究制备[J]. 发光学报, 2017,38(10): 1403-1408 DOI： 10.3788/fgxb20173810.1403.

CHEN Pei-zhuan, YU Li-yuan, NIU Ping-juan etc. Investigation and Preparation of Highly Reflective One Dimensional Photonic Crystal Based on Silicon Thin Films[J]. Chinese Journal of Luminescence, 2017,38(10): 1403-1408 DOI： 10.3788/fgxb20173810.1403.

摘要

采用射频等离子体增强化学气相沉积的方法，研究制备了一种基于硅基薄膜的高反射一维光子晶体。通过交替改变反应气体组分实现低折射率SiO

层和高折射率a-Si层的交替层叠沉积，具有两种膜层介质折射率比大、反射率高、沉积时间短、工艺窗口宽等优点。采用5周期的SiO

层与a-Si层构成的一维光子晶体（厚度分别为155 nm和55 nm），其禁带范围内（650~1100 nm）的平均反射率达到99.1%，高于相同波长范围内Ag的平均反射率（96.3%）。

Abstract

Highly reflective one dimensional photonic crystal (1D PC) based on silicon thin films was investigated and prepared using the radio frequency plasma enhanced chemical vapor deposition method. Both the low refractive index layer of SiO

and high refractive index layer of a-Si were deposited in the same chamber by alternatively changing the reaction gas component. The 1D PC has the advantage of high refractive index contrast

wide band gap

short depostion time and wide process window

which is a good candidate for the replacement of traditional high-reflection metal films. An average reflectivity of 99.1% was obtained within the bandgap (wavelength range of 650-1100 nm) for an 1D PC constructed with only 5 periods of SiO

and a-Si

which is significantly higher than the Ag film of 96.3%.

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references

MULLER J, RECH B, SPRINGER J, et al.. TCO and light trapping in silicon thin film solar cells[J]. Solar Energy, 2004, 77(6):917-930.

SAI H, JIA H, KONDO M. Impact of front and rear texture of thin-film microcrystalline silicon solar cells on their light trapping properties[J]. J. Appl. Phys., 2010, 108(4):044505.

KUO S Y, HONG K B, LU T C, et al.. Enhanced light output of UVA GaN vertical LEDs with novel DBR mirrors[J]. IEEE J. Quant. Electon., 2015, 51(12):011129.

SHIU G Y, CHEN K T, FAN F H, et al.. InGaN light-emitting diodes with an embedded nanoporous GaN distributed Bragg reflectors[J]. Sci. Rep. 2016, 6:29138.

LIN Y Y, XU Z, YU D, et al.. Dual-layer nanostructured flexible thin-film amorphous silicon solar cells with enhanced light harvesting and photoelectric conversion efficiency[J]. ACS Appl. Mater. Inter., 2016, 8(17):10929-10936.

陈培专, 侯国付, 索松, 等. 基于一维光子晶体的新型背反射器及其在非晶硅太阳能电池中的应用[J]. 物理学报, 2014, 63(7):128801. CHEN P Z, HOU G F, SUO S, et al.. One-dimensional photonic crystal(1D PC)-based back reflectors for amorphous silicon thin film solar cell[J]. Acta Phys. Sinica, 2014, 63(7):128801. (in Chinese)

BABA T. Slow light in photonic crystals[J]. Nat. Photon., 2008, 2(8):465-473.

KRAUSS T F, DE LA RUE R M. Photonic crystals in the optical regime-past, present and future[J]. Prog. Quant. Electron, 1999, 23(2):51-96.

BERMEL P, LUO C, ZENG L, et al.. Improving thin-film crystalline silicon solar cell efficiencies with photonic crystals[J]. Opt. Express, 2007, 15(25):16986-17000.

BISWAS R, BHATTACHARYA J, LEWIS B, et al.. Enhanced nanocrystalline silicon solar cell with a photonic crystal back-reflector[J]. Solar Engery Mater. Solar Cells, 2010, 94(12):2337-2342.

CHEN P Z, HOU G F, ZHANG J J, et al.. Optimal design of one-dimensional photonic crystal back reflectors for thin-film silicon solar cells[J]. J. Appl. Phys., 2014, 116(6):064508.

WU Y B, YANG W, WANG T B, et al.. Broadband perfect light trapping in the thinnest monolayer graphene-MoS2 photovoltaic cell:the new application of spectrum-splitting structure[J]. Sci. Rep., 2016, 6:20955.

武振华, 李思敏, 张文涛, 等. 一维和双层二维光子晶体太阳能电池背反射器[J]. 光子学报, 2016, 45(2):0223003. WU Z H, LI S M, ZHANG W T, et al.. Back reflector of solar cells consisting of one-dimensional photonic crystal and double-layered two-dimensional photonic crystal[J]. Acta Photon. Sinica, 2016, 45(2):0223003. (in Chinese)

LIU J T, WANG T B, LI X J, et al.. Enhanced absorption of monolayer MoS2 with resonant back reflector[J]. J. Appl. Phys., 2014, 115(19):193511.

LIU J T, LIU N H, LI J, et al.. Enhanced absorption of graphene with one-dimensional photonic crystal[J]. Appl. Phys. Lett., 2012, 101(5):052104.

XIANG C Y, KOO W, SO F, et al.. A systematic study on efficiency enhancements in phosphorescent green, red and blue microcavity organic light emitting devices[J]. Light:Sci. Appl.. 2013, 2:e74.

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