Regulation of Optical Properties of ZnO Nanorods Arrays by The Crossion of GaN Substrate

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Regulation of Optical Properties of ZnO Nanorods Arrays by The Crossion of GaN Substrate

更新时间：2020-08-12

- Regulation of Optical Properties of ZnO Nanorods Arrays by The Crossion of GaN Substrate
- Chinese Journal of Luminescence Vol. 38, Issue 10, Pages: 1307-1313(2017)
- 作者机构：
  
  1. 太原理工大学新材料界面科学与工程教育部重点实验室,山西太原,030024
  2. 太原理工大学新材料工程技术研究中心,山西太原,030024
- 作者简介：
- 基金信息：
- DOI：10.3788/fgxb20173810.1307
  CLC： O472.1;TN364
- Received：28 February 2017，
  
  Revised：17 March 2017，
  
  Published Online：22 June 2017，
  
  Published：05 October 2017
- 稿件说明：
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庞泽鹏, 梅伏洪, 乔建东等. GaN衬底的腐蚀程度对ZnO纳米棒阵列光学性能的调控[J]. 发光学报, 2017,38(10): 1307-1313

PANG Ze-peng, MEI Fu-hong, QIAO Jian-dong etc. Regulation of Optical Properties of ZnO Nanorods Arrays by The Crossion of GaN Substrate[J]. Chinese Journal of Luminescence, 2017,38(10): 1307-1313
庞泽鹏, 梅伏洪, 乔建东等. GaN衬底的腐蚀程度对ZnO纳米棒阵列光学性能的调控[J]. 发光学报, 2017,38(10): 1307-1313 DOI： 10.3788/fgxb20173810.1307.

PANG Ze-peng, MEI Fu-hong, QIAO Jian-dong etc. Regulation of Optical Properties of ZnO Nanorods Arrays by The Crossion of GaN Substrate[J]. Chinese Journal of Luminescence, 2017,38(10): 1307-1313 DOI： 10.3788/fgxb20173810.1307.

摘要

研究了在湿法腐蚀GaN衬底上生长的ZnO纳米棒阵列的微结构和光学性能。相比于未经腐蚀及腐蚀5 min、10 min的GaN上生长的ZnO纳米棒阵列，在腐蚀8 min的GaN上生长的ZnO纳米棒阵列最细密，光学性能最好，其相应PL光谱峰强积分比

I

UV

/

I

vis

最大（70.92）。因为此时GaN衬底中的位错基本全部在表面露头，ZnO容易附着而形成更多的形核种子，并且衬底的位错在表面的边缘有助于诱导ZnO晶体的外延生长，所以ZnO棒更加细密，晶体质量更高，从而光学性能更好。

Abstract

1-D ZnO nanorods arrays were fabricated on the wet etched GaN substrates and the microstructure and optical properties were studied. Compared with ZnO nanorods grown on GaN with no corrosion and corrosion for 5 min and 10 min

the nanorod arrays with the etching time of 8 min are the finest and have the best optical properties

besides its corresponding PL spectral peak integral ratio

I

UV

/

I

vis

is the largest. Because the dislocations in the GaN substrate with the etching time of 8 min are almost entirely in the surface outcrops

and the ZnO nanorods grown on it are easy to attach to form more nucleated seeds

furthermore it is helpful to induce the helical growth of ZnO crystals when the dislocations of the substrate are at the edge of the surface. Therefore

the ZnO nanorods are more compact and uniform

and the crystal quality and optical properties are more ideal.

关键词

Keywords

references

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