Fabrication of Vertical Structure Ultraviolet LED on 6H-SiC Substrate

LIU Ming-zhe; LI Peng-chong; DENG Gao-qiang; ZHANG Yuan-tao; ZHANG Bao-lin

doi:10.3788/fgxb20173806.0753

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Fabrication of Vertical Structure Ultraviolet LED on 6H-SiC Substrate

更新时间：2020-08-12

- Fabrication of Vertical Structure Ultraviolet LED on 6H-SiC Substrate
- Chinese Journal of Luminescence Vol. 38, Issue 6, Pages: 753-759(2017)
- 作者机构：
  
  吉林大学电子科学与工程学院集成光电子学国家重点联合实验室,吉林长春,130012
- 作者简介：
- 基金信息：
- DOI：10.3788/fgxb20173806.0753
  CLC： TN383;TH691.9
- Received：03 January 2017，
  
  Revised：19 February 2017，
  
  Published：05 June 2017
- 稿件说明：
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刘明哲, 李鹏翀, 邓高强等. 6H-SiC衬底上AlGaN基垂直结构紫外LED的制备[J]. 发光学报, 2017,38(6): 753-759

LIU Ming-zhe, LI Peng-chong, DENG Gao-qiang etc. Fabrication of Vertical Structure Ultraviolet LED on 6H-SiC Substrate[J]. Chinese Journal of Luminescence, 2017,38(6): 753-759
刘明哲, 李鹏翀, 邓高强等. 6H-SiC衬底上AlGaN基垂直结构紫外LED的制备[J]. 发光学报, 2017,38(6): 753-759 DOI： 10.3788/fgxb20173806.0753.

LIU Ming-zhe, LI Peng-chong, DENG Gao-qiang etc. Fabrication of Vertical Structure Ultraviolet LED on 6H-SiC Substrate[J]. Chinese Journal of Luminescence, 2017,38(6): 753-759 DOI： 10.3788/fgxb20173806.0753.

摘要

利用金属有机物化学气相沉积方法，在n型6H-SiC衬底上制备了15对Si掺杂Al

0.19

0.81

N/Al

0.37

0.63

N DBR，并采用低温AlN缓冲层有效抑制了DBR结构中裂纹的产生，得到了表面均方根粗糙度仅为0.4 nm且导电性能良好的n型DBR，其在369 nm处峰值反射率为68%，阻带宽度为10 nm。在获得导电DBR的基础上，进一步在n型6H-SiC衬底上构建了有、无DBR的垂直结构紫外LED。对比两者电致发光光谱，发现DBR结构的引入有效增强了LED紫外发光强度。

Abstract

Silicon-doped Al

0.19

0.81

N/Al

0.37

0.63

N DBRs were grown on n-type 6H-SiC substrates by metal organic chemical vapor deposition(MOCVD). To suppress the generation of cracks

a low-temperature AlN pre-deposition layer on 6H-SiC(0001) substrate was used as buffer. A smooth-surface 15-pair electrically conducting DBR with a reflectance of 68% at 369 nm was obtained. The stop-band bandwidth and RMS value of DBR are 10 nm and 0.4 nm

respectively. Furthermore

the vertical structure UV LEDs with and without n-DBR on 6H-SiC substrate were fabricated. By comparing EL spectra

it is shown that the introduction of DBR structure can effectively improve the UV emission.

关键词

Keywords

references

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