270/290/330 nm AlGaN-based Deep Ultraviolet Light-emitting Diodes with Different Al Content in Quantum Wells and Barriers

WANG Fu-xue; YE Xuan-chao

doi:10.3788/fgxb20173801.0057

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270/290/330 nm AlGaN-based Deep Ultraviolet Light-emitting Diodes with Different Al Content in Quantum Wells and Barriers

更新时间：2020-08-12

- 270/290/330 nm AlGaN-based Deep Ultraviolet Light-emitting Diodes with Different Al Content in Quantum Wells and Barriers
- Chinese Journal of Luminescence Vol. 38, Issue 1, Pages: 57-62(2017)
- 作者机构：
  
  1. 江南大学理学院,江苏无锡,中国,214122
  2. 无锡职业技术学院汽车与交通学院,江苏无锡,214121
- 作者简介：
- 基金信息：
  
  Supported by China Postdoctoral Science Foundation(2014M561623);Jiangsu Planned Pr
- DOI：10.3788/fgxb20173801.0057
  CLC： TN304.23
- Received：18 July 2016，
  
  Revised：14 September 2016，
  
  Published：05 January 2017
- 稿件说明：
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王福学, 叶煊超,. 量子阱层和垒层具有不同Al组分的270/290/330 nm AlGaN基深紫外LED光电性能[J]. 发光学报, 2017,38(1): 57-62

WANG Fu-xue, YE Xuan-chao,. 270/290/330 nm AlGaN-based Deep Ultraviolet Light-emitting Diodes with Different Al Content in Quantum Wells and Barriers[J]. Chinese Journal of Luminescence, 2017,38(1): 57-62
王福学, 叶煊超,. 量子阱层和垒层具有不同Al组分的270/290/330 nm AlGaN基深紫外LED光电性能[J]. 发光学报, 2017,38(1): 57-62 DOI： 10.3788/fgxb20173801.0057.

WANG Fu-xue, YE Xuan-chao,. 270/290/330 nm AlGaN-based Deep Ultraviolet Light-emitting Diodes with Different Al Content in Quantum Wells and Barriers[J]. Chinese Journal of Luminescence, 2017,38(1): 57-62 DOI： 10.3788/fgxb20173801.0057.

摘要

为了研究AlGaN量子阱层和垒层中Al组分不同对AlGaN基深紫外发光二极管（LED）光电性能的影响，本文利用MOCVD生长、光刻和干法刻蚀工艺制备了AlGaN量子阱层和垒层具有不同Al组分的270/290/330 nm深紫外LED，通过实验和数值模拟计算方法发现，量子阱层和垒层中具有低Al组分紫外LED的AlGaN材料具有较低的位错密度、较高的光输出功率和外量子效率。通过电流-电压（

I-V

）曲线拟合出的较大的理想因子（

3.5）和能带结构图表明，AlGaN深紫外LED的电流产生是隧穿机制占据主导作用，这是因为高Al组分AlGaN量子阱中强极化场造成了有源层区域较大的能带弯曲和电势降。

Abstract

The optical and electrical properties of 270/290/330 nm AlGaN-based deep ultraviolet (UV) light-emitting diodes (LEDs) with different Al content in quantum wells and barriers were investigated systematically. Based on the experimental and numerical study

It is observed that the UV LEDs with longer wavelength and lower Al composition in AlGaN multiple quantum wells (MQWs) possess less dislocation density

higher light output power and internal quantum efficiency. The large ideality factors calculated from

I-V

curves and simulated energy band profiles indicate that the current in the deep UV LEDs with high Al content is dominated by tunneling mechanism

which is attribute to the resulting potential drop in the active region caused by large polarization field in AlGaN MQWs.

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references

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