Tunable Nonlinear Optical Properties of nc-Ge/SiNx Multilayers

LI Cong; ZHANG Pei; JIANG Li-ying; CHEN Qing-hua; YAN Yan-xia; JIANG Su-xia

doi:10.3788/fgxb20163710.1217

您当前的位置：

首页 >

文章列表页 >

Tunable Nonlinear Optical Properties of nc-Ge/SiN_x Multilayers

更新时间：2020-08-12

- Tunable Nonlinear Optical Properties of nc-Ge/SiN_x Multilayers
- Chinese Journal of Luminescence Vol. 37, Issue 10, Pages: 1217-1222(2016)
- 作者机构：
  
  1. 中国电子科技集团公司第三十八研究所,安徽合肥,230088
  2. 固体微结构物理国家重点实验室, 江苏南京 210093
  3. 郑州轻工业学院电气信息工程学院,河南郑州,450002
- 作者简介：
- 基金信息：
- DOI：10.3788/fgxb20163710.1217
  CLC： O437;O484.4+1
- Received：22 April 2016，
  
  Revised：09 July 2016，
  
  Published：05 October 2016
- 稿件说明：
移动端阅览
李悰, 张培, 姜利英等. nc-Ge/SiNx多层膜材料的可调控非线性光学特性[J]. 发光学报, 2016,37(10): 1217-1222

LI Cong, ZHANG Pei, JIANG Li-ying etc. Tunable Nonlinear Optical Properties of nc-Ge/SiNx Multilayers[J]. Chinese Journal of Luminescence, 2016,37(10): 1217-1222
李悰, 张培, 姜利英等. nc-Ge/SiNx多层膜材料的可调控非线性光学特性[J]. 发光学报, 2016,37(10): 1217-1222 DOI： 10.3788/fgxb20163710.1217.

LI Cong, ZHANG Pei, JIANG Li-ying etc. Tunable Nonlinear Optical Properties of nc-Ge/SiNx Multilayers[J]. Chinese Journal of Luminescence, 2016,37(10): 1217-1222 DOI： 10.3788/fgxb20163710.1217.

摘要

采用等离子体增强化学气相沉积和后退火的方法制备了纳米锗/氮化硅（nc-Ge/SiN

）多层薄膜。借助Raman光谱仪对其微结构进行表征，测得样品的晶化率大于46%。由样品的光吸收谱可知，nc-Ge的尺寸越小，其光学带隙越大。利用Z扫描技术对样品的非线性光学特性进行研究，以波长为1 064 nm、脉宽为25 ps的锁模激光作为激发光，测得样品的非线性折射率系数在10

-10

/W数量级。实验结果表明，通过改变nc-Ge的尺寸可以使材料的非线性光学折射率由自散焦转变为自聚焦特性，而负的非线性折射率系数可归因于两步吸收产生的自由载流子散射效应。当激发光强增大时，在锗层厚度为6 nm的多层膜中同时存在两步吸收过程和饱和吸收过程。两种非线性光学吸收过程之间的竞争是样品呈现不同非线性光学特性的主要原因。

Abstract

Nanocrystalline Ge (nc-Ge)/SiN

multilayers were fabricated by plasma enhanced chemical vapor deposition technique and post-thermal annealing method. The microstructure was characterized through Raman spectroscopy

and the calculated crystallinity was higher than 46%. The optical absorption spectra reveal that the band gap enlarges as the grain size of nc-Ge decreases. The nonlinear optical properties of nc-Ge/SiN

multilayers were investigated through Z-scan technique by using a mode-locking laser with 25 ps pulse duration at 1 064 nm as the pump laser. The measured nonlinear refractive coefficient was about 10

-10

/W. It is interesting to found the nonlinear optical refraction changes from the self-defocusing to self-focusing with the increasing of the grain size of nc-Ge

and the negative nonlinear refractive coefficient can be attributed to the free carries dispersion generated by tow-step absorption process. Moreover

two-step absorption and saturation absorption process coexist in the multilayers with 6 nm Ge layer as the pump intensity increases. The different optical nonlinearities are mainly originated from the competition between the two nonlinear absorption processes.

关键词

Keywords

references

MARTINEZ A, BLASCO J, SANCHIS P, et al.. Ultrafast all-optical switching in a silicon-nanocrystal-based silicon slot waveguide at telecom wavelengths [J]. Nano Lett., 2010, 10(4):1506-1511.

RUKHLENKO I D, KALAVALLY V. Raman amplification in silicon-nanocrystal waveguides [J]. J. Lightwave Technol., 2014, 32(1):130-134.

刘石勇,李旺,牛新伟,等. 非晶硅锗薄膜与太阳能电池研究 [J]. 人工晶体学报, 2014, 43(4):765-770. LIU S Y,LI W,NIU X W, et al.. Study on amorphous silicon germanium( a-SiGe) thin films and solar cells [J]. J. Synth. Cryst., 2014, 43(4):765-770. (in Chinese)

ETTABIB M, KAPSALIS A, BOGRIS A, et al.. Polarization insensitive wavelength conversion in a dispersion-engineered SiGe waveguide [J]. IEEE Photon. Technol. Lett., 2016:1-1.

LI H P, KAM C H, LAM Y L, et al.. Nonlinear optical response of Ge nanocrystals in silica matrix with excitation of femtosecond pulses [J]. Appl. Phys. B: Lasers Opt., 2001, 72(5):611-615.

LI C, XU J, XU L, et al.. Optical absorption and charging effect in nano-crystalline Ge/SiNx multilayers [J]. Appl. Surf. Sci., 2013, 269:129-133.

LI C, XU J, LI W, et al.. Structural and electrical properties of laser-crystallized nanocrystalline Ge films and nanocrystalline Ge/SiNx multilayers [J]. Chin. Phys. B, 2013, 22(10):107201.

LI C, XU J, LI W, et al.. Formation of high quality nano-crystallized Ge films on quartz substrates at moderate temperature [J]. J. Vac. Sci. Technol. B, 2012, 30(5):051201.

李悰,徐骏,林涛,等. 超薄氢化非晶锗膜的结构与光电性质 [J]. 发光学报, 2011, 32(11):1165-1170. LI C, XU J, LIN T, et al.. Structural, electronic and optical properties of ultra-thin hydrogenated amorphous germanium films [J]. Chin. J. Lumin., 2011, 32(11):1165-1170. (in Chinese)

POULSEN P R, WANG M, XU J, et al.. Role of hydrogen surface coverage during anodic plasma deposition of hydrogenated nanocrystalline germanium [J]. J. Appl. Phys., 1998, 84:3386-3391.

TAUC J, GRIGOROVICI R, VANCU A. Optical properties and electronic structure of amorphous germanium [J]. Phys. Stat. Sol. (b), 1966, 15(2):627-637.

ZHENG D Q, SU W A, YE Q H, et al.. Controllable nonlinear refraction characteristics in hydrogenated nanocrystalline silicon [J]. J. Appl. Phys., 2014, 115(5):053510.

DOWD A, ELLIMAN R G, SAMOC M, et al.. Nonlinear optical response of Ge nanocrystals in a silica matrix [J]. Appl. Phys. Lett.,1999, 74(2):239-241.

JIE X, XIONG Y N, WEE A T S, et al.. Dynamics of optical nonlinearity of Ge nanocrystals in a silica matrix [J]. Appl. Phys. Lett., 2000, 77(24):3926-3928.

CHOI Y, PARK J H, KIM M R, et al.. Direct observation of self-focusing near the diffraction limit in polycrystalline silicon film [J]. Appl. Phys. Lett., 2001, 78(7):856-858.

SPANO R, DALDOSSO N, CAZZANELLI M, et al.. Bound electronic and free carrier nonlinearities in silicon nanocrystals at 1 550 nm [J]. Opt. Express, 2009, 17(5):3941-50.

GERUNG H, ZHAO Y, WANG L, et al.. Two-photon absorption of matrix-free Ge nanocrystals [J]. Appl. Phys. Lett., 2006, 89(11):111107.

SHEIK-BAHAE M, SAID A A, WEI T H, et al.. Sensitive measurement of optical nonlinearities using a single beam [J]. IEEE J Quant. Electron, 1990, 26:760-769.

王加贤,林正怀,张培,等. 纳米半导体复合薄膜的非线性光学性质及其在激光器中的应用 [J]. 光学精密工程, 2013, 21(1):20-25. WANG J X, LIN Z H, ZHANG P, et al.. Nonlinear optical properties of nanometer semiconductor compound films and their applications to lasers [J]. Opt. Precision Eng., 2013, 21(1):20-25. (in Chinese)

ZHANG P, ZHANG X W, XU J, et al.. Tunable nonlinear optical properties in nanocrystalline Si/SiO2 multilayers under femtosecond excitation [J]. Nanoscale Res. Lett., 2014, 9(1):1-6.

ZHANG P, ZHANG X W, LU P, et al.. Interface state-related linear and nonlinear optical properties of nanocrystalline Si/SiO2 multilayers [J]. Appl. Surf. Sci., 2014, 292:262-266.

Views

117

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Transient Dynamics of Excited States in PbS Nanoparticles by Femtosecond Pump and Probe Spectroscopy

Related Author

LI Dan

LIU Hong-mei

LIANG Chun-jun

Related Institution

Department of Physics, Beijing Jiaotong University

Daqing Heating Corporation

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176862 Email：fgxbt@126.com
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰