Test Method and System of Water Vapor Transmission Rate Based on Al2O3 Encapsulated Thin-film for OLEDs

DUAN Wei; LI Sheng; ZHANG Hao; ZHANG Zhi-lin; ZHANG Jian-hua

doi:10.3788/fgxb20163701.0088

您当前的位置：

首页 >

文章列表页 >

Test Method and System of Water Vapor Transmission Rate Based on Al₂O₃ Encapsulated Thin-film for OLEDs

更新时间：2020-08-12

- Test Method and System of Water Vapor Transmission Rate Based on Al₂O₃ Encapsulated Thin-film for OLEDs
- Chinese Journal of Luminescence Vol. 37, Issue 1, Pages: 88-93(2016)
- 作者机构：
  
  1. 上海大学机电工程与自动化学院上海,200072
  2. 上海大学新型显示技术及应用集成教育部重点实验室上海,200072
- 作者简介：
- 基金信息：
- DOI：10.3788/fgxb20163701.0088
  CLC： TN383+.1;TP274
- Received：08 October 2015，
  
  Revised：20 November 2015，
  
  Published：10 January 2016
- 稿件说明：
移动端阅览
段玮, 李晟, 张浩等. 基于Al2O3封装薄膜的OLED水汽透过率测试方法及系统研究[J]. 发光学报, 2016,37(1): 88-93

DUAN Wei, LI Sheng, ZHANG Hao etc. Test Method and System of Water Vapor Transmission Rate Based on Al2O3 Encapsulated Thin-film for OLEDs[J]. Chinese Journal of Luminescence, 2016,37(1): 88-93
段玮, 李晟, 张浩等. 基于Al2O3封装薄膜的OLED水汽透过率测试方法及系统研究[J]. 发光学报, 2016,37(1): 88-93 DOI： 10.3788/fgxb20163701.0088.

DUAN Wei, LI Sheng, ZHANG Hao etc. Test Method and System of Water Vapor Transmission Rate Based on Al2O3 Encapsulated Thin-film for OLEDs[J]. Chinese Journal of Luminescence, 2016,37(1): 88-93 DOI： 10.3788/fgxb20163701.0088.

摘要

水汽透过率(WVTR)是衡量有机电致发光器件(OLED)封装薄膜性能的重要参数之一。本文研究了基于钙电学法的WVTR测试方法

设计并研制了可满足OLED水汽透过率测试精度和功能要求的测试系统

测试精度达110

-6

-2

-1

量程为10 gm

-2

-1

可同时完成20个样品的快速、精确测量。利用本系统对采用原子层沉积技术制备的不同厚度Al

封装薄膜的WVTR进行了测试研究

结果表明

薄膜具有良好的水汽阻挡性能。

Abstract

For encapsulated thin film of the organic light emitting devices and flexible electronic devices

water vapor transmission rate (WVTR) is one of the most important parameters to evaluate the performance of thin film. In this paper

the method of calcium electrical test was studied. Based on this method

a new type of water vapor transmission measurement system was designed and developed

which can meet the requirement of accuracy and rapidity for WVTR testing of OLED. The results show that the precision of the system is 110

-6

-2

-1

and the range is 10 gm

-2

-1

. The system can measure 20 samples rapidly and accurately at the same time. Deposited by atomic layer deposition

the WVTR of the different thickness Al

thin films encapsulated layers (TFE) were studied. The results show that Al

thin film has low water vapor barrier properties.

关键词

Keywords

references

杨永强,段羽,陈平,等. 低温原子层沉积氧化铝作为有机电致发光器件的封装薄膜 [J]. 发光学报, 2014, 35(9):1087-1092. YANG Y Q, DUAN Y, CHEN P, et al.. Deposition of Al2O3 film using atomic layer deposition method at low temperature as encapsulation layer for OLEDs [J]. Chin. J. Lumin., 2014, 35(9):1087-1092. (in Chinese)

崔荣朕,唐艳茹,马玉芹,等. 蓝色有机电致发光材料及器件的研究进展 [J]. 应用化学, 2015, 32(8):855-872. CUI R Z, TANG Y R, MA Y Q, et al.. Research progress of investigation on organic blue materials and diodes [J]. Chin. J. Appl. Chem., 2015, 32(8):855-872. (in Chinese)

RIEDE M, MUELLER T, TRESSW, et al.. Small-molecule solar cells-status and perspectives [J]. Nanotechnology, 2008, 19(42):424001-1-6.

李玉霞,孟浩然,张斌,等. 基于LabView的伺服转台Stribeck摩擦测量系统 [J]. 液晶与显示, 2015, 30(1):180-185. LI Y X, MENG H R, ZHANG B, et al.. Stribeck friction measure system of serco table based on LABVIEW [J]. Chin. J. Liq. Cryst. Disp., 2015, 30(1):180-185. (in Chinese).

EUN H S, YOUNG W P, JIN H C. The flexible Ca-test:An improved performance in a gas permeability measurement system [J]. Rev. Sci. Instrum., 2011, 82(5):054702-1-7.

SCHUBERT S, KLUMBIES H, MVLLER-MESKAMP L, et al.. Electrical calcium test for moisture barrier evaluation for organic devices [J]. Rev. Sci. Instrum., 2011, 82(9):094101-1-8.

KEMPEl M D, REESE M O. Evaluation of the sensitivity limits of water vapor transmission rate measurements using electrical calcium test [J]. Rev. Sci. Instrum., 2013, 84(2):025109-1-6.

CROS S, FIRON M, LENFANT S, et al.. Internal sensor compensation for increased Ca test sensitivity [J]. Rev. Sci. Instrum., 2014, 85(7):075102-1-6.

ZHANG H, DING H, WEI M J, et al.. Thin film encapsulation for organic light-emitting diodes using inorganic/organic hybrid layers by atomic layer deposition [J]. Nanoscale Res. Lett., 2015, 10:169-175.

JIN S P, H C, H K C, et al.. Thin film encapsulation for flexible AM-OLED:a review [J]. Semicond. Sci. Technol. , 2011, 26(3):034001-1-6.

Views

137

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Fabrication of Al₂O₃/PMMA Laminates and Its Barrier Performance in OLED Encapsulation

Thin-film Encapsulation of Organic Light Emitting Diode by Atomic Layer Deposition

Influence of Indium-tin Oxide Reutilization on The Performance of Organic Light-emitting Devices

Organic Light Emitting Devices Based on Pure Exciplex Electroluminescence

Related Author

Xiong-tu ZHOU

Gui-xiong CHEN

Yong-ai ZHANG

Tai-liang GUO

Chao-xing WU

Fan SUN

Xiong-tu ZHOU

Gui-xiong CHEN

Related Institution

College of Physics and Information Engineering, Fuzhou University

Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China

College of Physics and Information Engineering， Fuzhou University

School of Electronic Engineering， Changchun College of Electronic Technology

State Key Laboratory of Integrated Optoelectronics， College of Electronic Science and Engineering， Jilin University

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176862 Email：fgxbt@126.com
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰