Influence of Grating Parameters on Reflectivity of Si/SiO2 High Contrast Gratings

LI Xiu-shan; NING Yong-qiang; ZHANG Xing; JIA Peng; CHEN Yong-yi; QIN Li; LIU Yun; WANG Li-

doi:10.3788/fgxb20153607.0806

您当前的位置：

首页 >

文章列表页 >

Influence of Grating Parameters on Reflectivity of Si/SiO₂ High Contrast Gratings

更新时间：2020-08-12

- Influence of Grating Parameters on Reflectivity of Si/SiO₂ High Contrast Gratings
- Chinese Journal of Luminescence Vol. 36, Issue 7, Pages: 806-810(2015)
- 作者机构：
  
  1. 发光学及应用国家重点实验室中国科学院长春光学精密机械与物理研究所,吉林长春,130033
  2. 中国科学院大学北京,100049
- 作者简介：
- 基金信息：
- DOI：10.3788/fgxb20153607.0806
  CLC： TN248.4
- Received：07 March 2015，
  
  Revised：12 April 2015，
  
  Published：03 July 2015
- 稿件说明：
移动端阅览
李秀山, 宁永强, 张星等. Si/SiO2高对比光栅参数对反射率的影响[J]. 发光学报, 2015,36(7): 806-810

LI Xiu-shan, NING Yong-qiang, ZHANG Xing etc. Influence of Grating Parameters on Reflectivity of Si/SiO2 High Contrast Gratings[J]. Chinese Journal of Luminescence, 2015,36(7): 806-810
李秀山, 宁永强, 张星等. Si/SiO2高对比光栅参数对反射率的影响[J]. 发光学报, 2015,36(7): 806-810 DOI： 10.3788/fgxb20153607.0806.

LI Xiu-shan, NING Yong-qiang, ZHANG Xing etc. Influence of Grating Parameters on Reflectivity of Si/SiO2 High Contrast Gratings[J]. Chinese Journal of Luminescence, 2015,36(7): 806-810 DOI： 10.3788/fgxb20153607.0806.

摘要

为解决850 nm波长VCSEL表面的GaAs/空气材料的高对比亚波长光栅(HCGs)稳定性差的问题

设计了基于Si/SiO

材料的高对比亚波长光栅。研究了850 nm波长高稳定、高反射率(

99.5%)的高对比亚波长矩形光栅参数的变化对反射率的影响。利用有限元分析软件计算了Si/SiO

高对比亚波长光栅的高度、填充因子、周期、刻蚀深度及光栅倾角等各个参数的变化对850 nm的反射率影响。计算结果表明:当波长为850 nm的TE光从SiO

正入射到矩形HCGs且只有在光栅的倾角大于88的小范围内变化时

HCGs的反射率才大于0.995

而光栅的其他参数对HCGs反射率的影响可以忽略不计。

Abstract

In order to solve the problem of poor stability of high contrast gratings (HCGs) for 850 nm VCSEL

a new type of Si/SiO

HCGs was put forward. The influence of grating parameters on HCG reflectivity of 850 nm was studied. The influence of the grating parameters

such as height

fill factor

duty

etching depth

angle

on the reflectivity of Si/SiO

HCGs for 850 nm was simulated and analyzed by the finite element analysis software. For the 850 nm TE light incidence from SiO

to the rectangular HCGs

it is found that only when the angle of gating is greater than 88

can the reflectivity of HCGs be greater than 0.995

and other parameters of HCGs have a larger tolerance.

关键词

Keywords

references

Karagodsky V, Sedgwick F G, Chang-Hasnain C J. Theoretical analysis of subwavelength high contrast grating reflectors [J]. Opt. Express, 2010, 18(16):16973-16988.

Chang-Hasnain C J, Zhou Y, Huang M, et al. High-contrast grating VCSELs [J]. IEEE J. Sel. Top. Quant. Electron., 2009, 15(3):869-878.

Huang M C Y, Zhou Y, Chang-Hasnain C J. A surface-emitting laser incorporating a high-index-contrast subwavelength grating [J]. Nat. Photon., 2007, 1(2):119-122.

Huang M C Y, Zhou Y, Chang-Hasnain C J. A nanoelectromechanical tunable laser [J]. Nat. Photon., 2008, 2(3):180-184.

Yang H, Guo X, Guan B L, et al. The influence of injection current on transverse mode characteristics of vertical-cavity surface-emitting lasers [J]. Acta Phys. Sinica (物理学报), 2008, 57(5):2959-2965 (in Chinese).

Zhang J S, Ning Y Q, Zhang J L, et al. Temperature characteristic analysis of 808 nm vertical cavity surface emitting laser arrays [J]. Chin. J. Lumin.(发光学报), 2013, 34(12):1636-1640 (in Chinese).

Zhang X W, Ning Y Q, Qin L, et al. Study of oxide grating vertical cavity surface emitting lasers [J]. Chin. J. Lumin. (发光学报), 2013, 34(11):1517-1520 (in Chinese).

Huang M C, Zhou Y, Chang-Hasnain C J. Polarization mode control in high contrast subwavelength grating VCSEL //Conference on Lasers and Electro-Optics, San Jose: Optical Society of America, 2008:1-2.

Debernardi P, Ostermann J M, Feneberg M, et al. Reliable polarization control of VCSELs through monolithically integrated surface gratings: A comparative theoretical and experimental study [J]. IEEE J. Sel. Top. Quant. Electron., 2005, 11(1):107-116.

Ostermann J M, Debernardi P, Jalics C, et al. Shallow surface gratings for high-power VCSELs with one preferred polarization for all modes [J]. IEEE Photon. Technol. Lett., 2005, 17(8):1593-1595.

Zhou Y, Huang M C Y, Chase C, et al. High-index-contrast grating (HCG) and its applications in optoelectronic devices [J]. IEEE J. Sel. Top. Quant. Electron., 2009, 15(5):1485-1499.

Palik E D. Optical Constants of Solids [M]. London: Academic Press, 1998:578-580.

Views

125

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Thermal Analysis and Fiber Coupling Simulation Design of Multi-single Emitters Stacked Semiconductor Laser

Heat Transfer Characteristics of High Power Semiconductor Laser with Graphite Sheet as Auxiliary Heat Sink

φ2 020 mm Aperture Space Infrared Camera Main Reflector Design

Thermal Performance of High-power Semiconductor Laser Packaged by Ceramic Submount

Transmission Properties of Grating Structures Containing Lossy Negative Permittivity Material

Related Author

Li XU

Wei-yan LI

Yan LI

He ZHANG

Xiao-hui MA

Lin-lin SHI

Jiao-jiao WANG

YANG Zhi-kun

Related Institution

State Key Laboratory of High Power Semiconductor Laser, Changchun University of Science and Technology

National Key Laboratory on High Power Semiconductor Laser, Changchun University of Science and Technology

Changchun University of Science and Technology

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

National Engineering Research Center for Optoelectronic Devices, Institute of Semiconductors, Chinese Academy of Sciences

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176862 Email：fgxbt@126.com
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰