Effects of Electrode Materials on The Performances of IGZO-based Thin Film Transistor

LIU Chong; WEI Min; YANG Fan; JIA Zhuo; DENG Hong

doi:10.3788/fgxb20143511.1365

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Effects of Electrode Materials on The Performances of IGZO-based Thin Film Transistor

更新时间：2020-08-12

- Effects of Electrode Materials on The Performances of IGZO-based Thin Film Transistor
- Chinese Journal of Luminescence Vol. 35, Issue 11, Pages: 1365-1369(2014)
- 作者机构：
  
  电子科技大学电子薄膜与集成器件国家重点实验室,四川成都,610054
- 作者简介：
- 基金信息：
- DOI：10.3788/fgxb20143511.1365
  CLC： TN321+.5
- Received：16 June 2014，
  
  Revised：26 September 2014，
  
  Published：03 November 2014
- 稿件说明：
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刘冲, 韦敏, 杨帆等. 电极材料对IGZO薄膜晶体管性能的影响[J]. 发光学报, 2014,35(11): 1365-1369

LIU Chong, WEI Min, YANG Fan etc. Effects of Electrode Materials on The Performances of IGZO-based Thin Film Transistor[J]. Chinese Journal of Luminescence, 2014,35(11): 1365-1369
刘冲, 韦敏, 杨帆等. 电极材料对IGZO薄膜晶体管性能的影响[J]. 发光学报, 2014,35(11): 1365-1369 DOI： 10.3788/fgxb20143511.1365.

LIU Chong, WEI Min, YANG Fan etc. Effects of Electrode Materials on The Performances of IGZO-based Thin Film Transistor[J]. Chinese Journal of Luminescence, 2014,35(11): 1365-1369 DOI： 10.3788/fgxb20143511.1365.

摘要

采用射频磁控溅射方法在n型硅片上制备了底栅顶结构的铟镓锌氧-薄膜晶体管(IGZO-TFT)。分别采用Au、Cu、Al 3种金属材料作为电极

研究不同电极材料对IGZO薄膜晶体管性能的影响。器件的输出特性和转移特性测试结果表明:以Au为电极的IGZO-TFT具有最佳的性能

其饱和输出电流达到17.9 A

开关比达到1.410

。基于功函数比较分析了3种电极的接触特性

根据TLM(Transmission line model)理论推算得出Au电极具有三者中最小的接触电阻。

Abstract

Indium gallium zinc oxide thin film transistors (IGZO-TFTs) with bottom-gate top structure were fabricated on n-type silicon substrates using radio frequency (RF) magnetron sputtering method. Three kinds of metal material such as Au

and Al were used to fabricate electrode

respectively

and the effects of different electrode materials on IGZO TFT performance were investigated. The output characteristic and transfer characteristic of the TFT devices were tested. The best performance was obtained when Au was used to fabricate electrode

its saturation output current was 17.9 A

and on-off current ratio was up to 1.410

. In addition

the contact characteristics between three kinds of electrodes and IGZO thin film were analyzed based on their work function. Au electrode had the smallest contact resistance of these three metal according to the TLM(transmission line model) theory.

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Keywords

references

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