Effect of Electrode Spacing on The Properties of ZnO Based MSM Ultraviolet Photodetector

LI Chao-qun; CHEN Hong-yu; ZHANG Zhen-zhong; LIU Ke-wei; SHEN De-zhen

doi:10.3788/fgxb20143510.1172

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Effect of Electrode Spacing on The Properties of ZnO Based MSM Ultraviolet Photodetector

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- Effect of Electrode Spacing on The Properties of ZnO Based MSM Ultraviolet Photodetector
- Chinese Journal of Luminescence Vol. 35, Issue 10, Pages: 1172-1175(2014)
- 作者机构：
  
  1. 发光学及应用国家重点实验室中国科学院长春光学精密机械与物理研究所,吉林长春,130033
  2. 中国科学院大学北京,100049
- 作者简介：
- 基金信息：
- DOI：10.3788/fgxb20143510.1172
  CLC： O484.4
- Received：30 April 2014，
  
  Revised：26 May 2014，
  
  Published Online：11 June 2014，
  
  Published：03 October 2014
- 稿件说明：
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李超群, 陈洪宇, 张振中等. 电极间距对ZnO基MSM紫外光电探测器性能的影响[J]. 发光学报, 2014,35(10): 1172-1175

LI Chao-qun, CHEN Hong-yu, ZHANG Zhen-zhong etc. Effect of Electrode Spacing on The Properties of ZnO Based MSM Ultraviolet Photodetector[J]. Chinese Journal of Luminescence, 2014,35(10): 1172-1175
李超群, 陈洪宇, 张振中等. 电极间距对ZnO基MSM紫外光电探测器性能的影响[J]. 发光学报, 2014,35(10): 1172-1175 DOI： 10.3788/fgxb20143510.1172.

LI Chao-qun, CHEN Hong-yu, ZHANG Zhen-zhong etc. Effect of Electrode Spacing on The Properties of ZnO Based MSM Ultraviolet Photodetector[J]. Chinese Journal of Luminescence, 2014,35(10): 1172-1175 DOI： 10.3788/fgxb20143510.1172.

摘要

利用金属有机物化学气相沉积法在蓝宝石衬底上制备了ZnO薄膜。利用Au电极，在ZnO薄膜上制备电极间距不同的金属-半导体-金属结构紫外光电探测器。发现随着电极间距从150 m降至5 m，探测器响应度呈现出从15 mA/W到75 mA/W的明显提高。同时，随着电极间距的减小，器件的

I-V

曲线线形发生了显著改变。这被归结为电极间距变化改变了器件耗尽区宽度和电极间电阻造成的结果。

Abstract

By using mental-organic chemical vapor deposition

ZnO films were prepared on sapphire substrate in this work. Three MSM ultraviolet photodetectors with different electrode spacings were fabricated on ZnO films. The detector responsivity achieves marked increase from 15 mA/W to 75 mA/W as the electrode spacing decreases from 150 m to 5 m. At the same time

with the decrease of the electrode spacing

I-V

curve of the device changes significantly. It is attributed to that the electrode spacing affects the properties of MSM photodetectors because it results in different depletion region width and the resistance between the electrode.

关键词

Keywords

references

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