Epitaxial (110)-oriented Cubic MgZnO Films on m-plane Sapphire for Solar-blind UV Photodetectors

ZHENG Jian; ZHANG Zhen-zhong; ZHANG Ji-ying; LIU Yi-chun; WANG Shuang-peng; JIANG Ming-mi

doi:10.3788/fgxb20143506.0678

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Epitaxial (110)-oriented Cubic MgZnO Films on m-plane Sapphire for Solar-blind UV Photodetectors

更新时间：2020-08-12

- Epitaxial (110)-oriented Cubic MgZnO Films on m-plane Sapphire for Solar-blind UV Photodetectors
- Chinese Journal of Luminescence Vol. 35, Issue 6, Pages: 678-683(2014)
- 作者机构：
  
  1. 发光学及应用国家重点实验室中国科学院长春光学精密机械与物理研究所,吉林长春,130033
  2. 中国科学院大学北京,100049
  3. 东北师范大学先进光电子功能材料研究中心,吉林长春,130024
- 作者简介：
- 基金信息：
- DOI：10.3788/fgxb20143506.0678
  CLC： O484.4
- Received：03 March 2014，
  
  Revised：14 April 2014，
  
  Published：03 June 2014
- 稿件说明：
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郑剑, 张振中, 张吉英等. m面蓝宝石上外延（110）取向立方MgZnO薄膜及其日盲紫外探测器件研究[J]. 发光学报, 2014,35(6): 678-683

ZHENG Jian, ZHANG Zhen-zhong, ZHANG Ji-ying etc. Epitaxial (110)-oriented Cubic MgZnO Films on m-plane Sapphire for Solar-blind UV Photodetectors[J]. Chinese Journal of Luminescence, 2014,35(6): 678-683
郑剑, 张振中, 张吉英等. m面蓝宝石上外延（110）取向立方MgZnO薄膜及其日盲紫外探测器件研究[J]. 发光学报, 2014,35(6): 678-683 DOI： 10.3788/fgxb20143506.0678.

ZHENG Jian, ZHANG Zhen-zhong, ZHANG Ji-ying etc. Epitaxial (110)-oriented Cubic MgZnO Films on m-plane Sapphire for Solar-blind UV Photodetectors[J]. Chinese Journal of Luminescence, 2014,35(6): 678-683 DOI： 10.3788/fgxb20143506.0678.

摘要

由于在日盲紫外探测方面的应用前景，具有合适带隙的MgZnO合金半导体薄膜受到越来越多的关注。获得具有择优取向的单一相MgZnO对提升MgZnO基日盲紫外探测器性能至关重要。本文利用低压金属有机化学气相沉积（LP-MOCVD）方法在

面蓝宝石衬底上制备了一系列不同组分的Mg

O薄膜。光学和结构特性测试结果表明：Zn摩尔分数达到55%的Mg

0.45

0.55

O薄膜依然是单一立方相，其光学带隙可以达到4.7 eV。立方岩盐结构MgZnO与

面蓝宝石衬底的外延结构关系为（110）

MgZnO

‖（10

0）

sapphire

、[001]

MgZnO

‖[1

10]

sapphire

和[

10]

MgZnO

‖[0001]

sapphire

。唯一确定的面内取向有利于薄膜晶体质量的提高。基于（110）取向立方相Mg

0.45

0.55

O薄膜制备金属-半导体-金属（MSM）结构器件，获得了光响应峰在260 nm、光响应截止波长278 nm的日盲紫外探测器。

Abstract

A series of Mg

O alloy films were grown on

-plane sapphire by low-pressure metalorganic chemical vapor deposition (LP-MOCVD). Optical and structural characterizations indicated that the films with Zn mole fraction up to 55% are single-cubic-phased

and the optical bandgap of Mg

0.45

0.55

O film is 4.7 eV. The epitaxial [JP2]relationships between substrate and rocksalt MgZnO layers were determined as (110)

MgznO

‖(10

sapphire

[001]

MgZnO

‖[1

10]

sapphire

and [

10]

MgZnO

‖[0001]

sapphire

. The fixed uniform orientation of the films was accompanied by an improvement in crystal quality. A metal-semiconductor-metal structured solar-blind ultraviolet detector fabricated on Mg

0.45

0.55

O film showed a response peak at 260 nm and a sharp cutoff at 278 nm.

关键词

Keywords

references

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