ZUO Jing, GUO Xiao-yang, LIU Xing-yuan. V<sub>2</sub>O<sub>5</sub>/Ag/V<sub>2</sub>O<sub>5</sub> Multilayer Transparent Conductive Films Based on Sol-gel and Electron Beam Evaporation Techniques[J]. Chinese Journal of Luminescence, 2014,35(3): 360-365
ZUO Jing, GUO Xiao-yang, LIU Xing-yuan. V<sub>2</sub>O<sub>5</sub>/Ag/V<sub>2</sub>O<sub>5</sub> Multilayer Transparent Conductive Films Based on Sol-gel and Electron Beam Evaporation Techniques[J]. Chinese Journal of Luminescence, 2014,35(3): 360-365 DOI: 10.3788/fgxb20143503.0360.
V2O5/Ag/V2O5 Multilayer Transparent Conductive Films Based on Sol-gel and Electron Beam Evaporation Techniques
(VAV)透明导电薄膜,研究了各层薄膜厚度对叠层结构光电特性的影响。用原子力显微镜、紫外-可见光分光光度计、四探针电阻仪及开尔文探针对样品的表面形貌、光电性能及功函数等性质进行了表征。实验结果表明,该薄膜具有良好的光学和电学性质,可见光(380~780 nm)平均透过率达75%,迁移率为16.89 cm
2
/(Vs),载流子浓度为-1.04310
22
cm
-3
,方块电阻值为15.1 /□,功函数为5.17 eV。该制备方法降低了V
2
O
5
薄膜的工艺制备难度,为该材料在太阳能电池中的应用创造了良好的前期基础。
Abstract
V
2
O
5
/Ag/V
2
O
5
(VAV) multi-layer transparent conductive film was prepared by the combination of sol-gel technique and electron beam evaporation at room temperature. The effects of each layer's thickness on photoelectrical properties and surface appearance of multi-layers were studied by atomic force microscope
UV-Vis spectrophotometer
four-point probe method and Kelvin probe. The experiments results reveal that the multi-layer transparent conductive film has desirable photo-electrical properties with average transmission of 75%(380~780 nm)
mobility of 16.89 cm
2
/(Vs)
carrier concentration of -1.04310
22
cm
-3
the sheet resistance of 15.1 /□
and work function of 5.17 eV. This method reduces the difficulty of fabricating V
2
O
5
/Ag/V
2
O
5
multi-layer films
providing a kind of promising transparent electrode for solar cells.
关键词
Keywords
references
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Study of New Transparent Conductive Film with Erbium Fluoride Doped Indium Oxide
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Related Institution
State Key Laboratory of Silicon and Advanced Semiconductor Materials, School of Materials Science and Engineering, Zhejiang University
State Key Laboratory of Luminescence and Applications, Changchun Insitute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
University of Chinese Academy of Sciences
State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China