Comparative Study of Polar and Non-polar BeZnO Films Grown by Plasma-assisted Molecular Beam Epitaxy

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Comparative Study of Polar and Non-polar BeZnO Films Grown by Plasma-assisted Molecular Beam Epitaxy

更新时间：2020-08-12

- Comparative Study of Polar and Non-polar BeZnO Films Grown by Plasma-assisted Molecular Beam Epitaxy
- Chinese Journal of Luminescence Vol. 34, Issue 11, Pages: 1483-1488(2013)
- 作者机构：
  
  1. 中山大学理工学院光电材料国家重点实验室,广东广州,510000
  2. 中国科学院深圳先进技术研究院,广东深圳,518055
  3. 香港科技大学物理系, 香港, 清水湾九龙
- 作者简介：
- 基金信息：
  
  973"
- DOI：10.3788/fgxb20133411.1483
  CLC： O484
- Received：14 May 2013，
  
  Revised：24 July 2013，
  
  Published：10 November 2013
- 稿件说明：
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王玉超, 吴天准, 陈明明, 苏龙兴, 张权林, 汤子康. 分子束外延生长的极性与非极性BeZnO薄膜的比较研究[J]. 发光学报, 2013,34(11): 1483-1488

WANG Yu-chao, WU Tian-zhun, CHEN Ming-ming, SU Long-xing, ZHANG Quan-lin, TANG Zi-kang. Comparative Study of Polar and Non-polar BeZnO Films Grown by Plasma-assisted Molecular Beam Epitaxy[J]. Chinese Journal of Luminescence, 2013,34(11): 1483-1488
王玉超, 吴天准, 陈明明, 苏龙兴, 张权林, 汤子康. 分子束外延生长的极性与非极性BeZnO薄膜的比较研究[J]. 发光学报, 2013,34(11): 1483-1488 DOI： 10.3788/fgxb20133411.1483.

WANG Yu-chao, WU Tian-zhun, CHEN Ming-ming, SU Long-xing, ZHANG Quan-lin, TANG Zi-kang. Comparative Study of Polar and Non-polar BeZnO Films Grown by Plasma-assisted Molecular Beam Epitaxy[J]. Chinese Journal of Luminescence, 2013,34(11): 1483-1488 DOI： 10.3788/fgxb20133411.1483.

摘要

采用分子束外延设备在不同晶面蓝宝石衬底上(

c

面

a

面

r

面)生长BeZnO薄膜。使用复合缓冲层生长得到了高质量的BeZnO薄膜

X射线衍射半高宽达到600 arcsec。在

c

面与

a

面蓝宝石衬底上生长得到了极性BeZnO薄膜

在

r

面蓝宝石上生长得到了非极性BeZnO薄膜。共振拉曼光谱测试结果表明薄膜中的Be含量在同一水平。相对于

c

面与

a

面蓝宝石上的极性BeZnO薄膜

生长在

r

面蓝宝石衬底上的非极性BeZnO薄膜具有较大的表面粗糙度以及较大的半高宽

但是其光致发光谱中的紫外发光峰远远强于极性BeZnO薄膜

并且黄绿光发光峰弱于极性BeZnO薄膜。

Abstract

BeZnO films were grown on different crystallographic planes (

c-

a

- and

r

-planes) of sapphire substrates using plasma-assisted molecular beam epitaxy (P-MBE). High quality BeZnO films were achieved using a multi-layer buffer design with full widths at half maximum (FWHMs) of rocking curves up to 600 arcsec. Polar BeZnO films were obtained on the

a-

and

c-

plane sapphire substrates

while the nonpolar ones were obtained on the

r

-plane sapphire substrate. The Raman spectroscopy confirmed the Be dopants in the ZnO were at the same level in three samples. The BeZnO sample grown on the

r

-sapphire substrate were found to have largest grains and higher FWHM

while the ones grown on

a-

and

c-

sapphire subatrates had the similar fine grains and lower FWHM. However

the photoluminescence (PL) spectra indicated the non-polar BeZnO sample had significantly stronger ultraviolet emission and weaker green emission than polar samples.

关键词

Keywords

references

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