Stable Polarization Control of 980 nm High-power Vertical-cavity Surface-emitting Lasers Using Sub-wavelength Rectangular-metal-gratings

ZHANG Xiang-wei; NING Yong-qiang; QIN Li; LIU Yun; WANG Li-jun

doi:10.3788/fgxb20133409.1188

您当前的位置：

首页 >

文章列表页 >

Stable Polarization Control of 980 nm High-power Vertical-cavity Surface-emitting Lasers Using Sub-wavelength Rectangular-metal-gratings

更新时间：2020-08-12

- Stable Polarization Control of 980 nm High-power Vertical-cavity Surface-emitting Lasers Using Sub-wavelength Rectangular-metal-gratings
- Chinese Journal of Luminescence Vol. 34, Issue 9, Pages: 1188-1193(2013)
- 作者机构：
  
  1. 发光学及应用国家重点实验室中国科学院长春光学精密机械与物理研究所,吉林长春,130033
  2. 中国科学院大学, 北京 100049
- 作者简介：
- 基金信息：
- DOI：10.3788/fgxb20133409.1188
  CLC： TN248.4
- Received：12 April 2013，
  
  Revised：17 May 2013，
  
  Published：10 September 2013
- 稿件说明：
移动端阅览
张祥伟, 宁永强, 秦摇莉, 刘摇云, 王立军. 利用亚波长矩形金属光栅稳定980 nm高功率垂直腔面发射激光器偏振[J]. 发光学报, 2013,34(9): 1188-1193

ZHANG Xiang-wei, NING Yong-qiang, QIN Li, LIU Yun, WANG Li-jun. Stable Polarization Control of 980 nm High-power Vertical-cavity Surface-emitting Lasers Using Sub-wavelength Rectangular-metal-gratings[J]. Chinese Journal of Luminescence, 2013,34(9): 1188-1193
张祥伟, 宁永强, 秦摇莉, 刘摇云, 王立军. 利用亚波长矩形金属光栅稳定980 nm高功率垂直腔面发射激光器偏振[J]. 发光学报, 2013,34(9): 1188-1193 DOI： 10.3788/fgxb20133409.1188.

ZHANG Xiang-wei, NING Yong-qiang, QIN Li, LIU Yun, WANG Li-jun. Stable Polarization Control of 980 nm High-power Vertical-cavity Surface-emitting Lasers Using Sub-wavelength Rectangular-metal-gratings[J]. Chinese Journal of Luminescence, 2013,34(9): 1188-1193 DOI： 10.3788/fgxb20133409.1188.

摘要

利用亚波长矩形金属光栅的偏振特性

在垂直腔面发射激光器的有源区引入各向异性增益从而达到控制其偏振的目的。光栅参数设计基于均匀介质理论和抗反射理论

光栅设计周期为186 nm

占空比为0.5

并且光栅制作于GaAs盖层来对TE偏振光提供额外的反射率。经过设计分析对p-DBRs的对数进行了缩减

并且将光栅条之间的盖层区域刻蚀掉

刻蚀深度为1 m左右。盖层刻蚀的结果使电流注入的方向严格沿着光栅条线性注入的有源区

从而增加了非均匀增益并提高了偏振比。通过多物理场有限元分析软件对器件进行了模拟分析

结果基本上符合设计要求。通过优化工艺步骤

最终得到了550 m孔径器件的输出功率为780 mW

并且偏振比达到4.8的结果。

Abstract

The polarization control of vertical-cavity surface-emitting lasers with high power emission is demonstrated by using metal-grating to import non-isotropic gain. The grating with a period of 186 nm and a duty ratio of 0.5 was fabricated on the GaAs-cap layer to provide additional reflectance for TE polarization. The pairs of p-DBRs were reduced and the GaAs-cap between grating stripes was etched to force the current to be injected linearly along grating stripes to realize the maximum non-isotropic gain. A polarization ratio of 4.8

an output power of 780 mW and high temperature performance were demonstrated for a 550 m aperture device. Key words : vertical-cavity surface-emitting laser; metal-grating; polarization controlling CLC number: TN248.4 Document code: A

关键词

Keywords

references

Kosaka H. Smart integration and packaging of 2D VCSELs of high speed parallel links[J]. IEEE Select. Topics Quant. Elect., 1999, 5(2):184-192.[2] Huffaker D L, Deppe D G, Kumar K, et al. Native-oxide defined ring contact for low threshold vertical-cavity lasers [J]. Appl. Phys. Lett., 1994, 65(1):97-99.[3] Seurin J F, Ghosh C L, Khalfin V, et al. High-power high-efficiency 2D VCSEL arrays [J]. SPIE, 2008, 6908:690808-1-14. [4] Geels R S, Corzine S W, Coldren L A. InGaAs vertical cavity surface emitting lasers [J]. IEEE J. Quantum Elect., 1991, 27(6):1359-1367.[5] Iga K, Ishikawa S, Ohkouchi S, et al. Room temperature plused oscillation of GaAlAs/GaAs surface emitting injection laser [J]. Appl. Phys. Lett., 1984, 45(4):348-350.[6] Tell B, Lee Y H, Brown-Goebeler K F, et al. High-power cw vertical-cavity top surface-emitting GaAs quantum well lasers [J]. Appl. Phys. Lett., 1990, 57(18):1855-1857.[7] Zhang X, Ning Y Q, Zeng Y G, et al. Optimization of element structure in 980 nm high-power vertical-cavity surface-emitting laser array [J]. Opt. Precision Eng.[HTK](光学精密工程),[HTSS] 2011, 19(9):2014-2022 (in Chinese).[8] Wang Z F, Ning Y Q, Zhang Y, et al. High power and good beam quality of two-dimensional VCSEL array with integrated GaAs microlens array [J]. Opt. Exp., 2010, 18(23):23900-1-6. [9] Chong C H, Sarma J. Lasing mode selection in vertical cavity surface emitting laser diodes [J]. IEEE Photon. Technol. Lett., 1993, 5(7):761-763.[10] Bond A E, Dapkus P D, OBrien J D. Aperture dependent loss analysis in vertical-cavity surface-emitting lasers [J]. IEEE Photon. Technol. Lett., 1999, 11(4):397-399.[11] Grabherr M, King R, Jger R, et al. Volume production of polarization controlled single-mode VCSELs [J]. SPIE, 2008, 6908(1):690803-1-8.[12] Schnabel B, Kley E B, Frank W. Efficient coupling into polymer waveguides by gratings [J]. Appl. Opt., 1997, 36(36):9383-9390.[13] Kou J L, Chen Y, Xu F, et al. Miniaturized broadband highly birefringent device with stereo rod-microfiber-air structure [J]. Opt. Exp., 2012, 20(27):28431-28436.[14] Takahashi Y, Neogi A, Kawaguchi H. Polarization dependent nonlinear gain in semiconductor lasers [J]. IEEE J. Quant. Elect., 1998, 34(9):1660-1672.[15] Wang W, Ning Y Q, Tian Z H, et al. Coherent polarization stabilization in large-aperture rectangular post bottom-emitting vertical-cavity surface-emitting lasers [J]. Opt. Commun., 2011, 284(5):1335-1338.[16] Jiao D, Jin J M. Three-dimensional orthogonal vector basis functionsf or time-domain finite element solution of vector wave equations [J]. IEEE Trans. Anten. Prop., 2003, 51(1):59-66.[17] Wulf K T, Zamora M, Kanwar R, K. et al. Processing of photonic crystals in InP membranes by focused ion beam milling and plasma etching [J]. Microelectron. Eng., 2013, 102(1):25-28.[18] Bomzon Z, Kleiner V, Hasman E. Spatial fourier-transform polarimetry using space-variant subwavelength metal-stripe polarizers [J]. Opt. Commun., 2001, 26(21):1711-1713.[19] Wilkinson C I, Woodhead J, Frost J E F, et al. Electrical polarization control of vertical-cavity surface-emitting lasers using polarized feedback and a liquid crystal [J]. IEEE Photon. Technol. Lett., 1999, 11(2):155-157.[20] Sun Y F, Ning Y Q, Li T, et al. Large aperture VCSELs with a continuous-wave output power of 1.95 W [J]. J. Lumin., 2007, 122-123:886-888.

Views

147

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Polarization Control of 980 nm High-power Vertical-cavity Surface-emitting Lasers by Using Sub-wavelength Metal-gratings

Study of Oxide-grating Vertical-cavity Surface-emitting Lasers

80 Gb/s High Speed PAM4 Modulated 850 nm Vertical-cavity Surface-emitting Laser

Design of Active Region for Watt-level VCSEL at 1 060 nm

Coherent Measurement and Analysis of Vertical-cavity Surface-emitting Laser

Related Author

WANG Li-jun

LIU Yun

QIN Li

NING Yong-qiang

ZHANG Xiang-wei

QIN Li

LIU Yun

Related Institution

State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

Graduate University of Chinese Academy of Sciences

University of Chinese Academy of Sciences

Xi'an Technological University

State Key Laboratory of Luminescence and Applications， Changchun Institute of Optics， Fine Mechanics and Physics， Chinese Academy of Sciences

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176862 Email：fgxbt@126.com
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰