Fabrication of Subwavelength Metal Grating and Analysis with Vector Diffraction Theory

ZHENG Gai-ge; ZHAN Yu; CAO Kun; XU Lin-hua

doi:10.3788/fgxb20133407.0935

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Fabrication of Subwavelength Metal Grating and Analysis with Vector Diffraction Theory

更新时间：2020-08-12

- Fabrication of Subwavelength Metal Grating and Analysis with Vector Diffraction Theory
- Chinese Journal of Luminescence Vol. 34, Issue 7, Pages: 935-939(2013)
- 作者机构：
  
  南京信息大学物理与光电工程学院, 江苏南京 210044
- 作者简介：
- 基金信息：
- DOI：10.3788/fgxb20133407.0935
  CLC： O439
- Received：14 April 2013，
  
  Revised：22 May 2013，
  
  Published：10 July 2013
- 稿件说明：
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郑改革, 詹煜, 曹焜, 徐林华. 亚波长金属光栅结构的制备与矢量衍射理论分析[J]. 发光学报, 2013,34(7): 935-939

ZHENG Gai-ge, ZHAN Yu, CAO Kun, XU Lin-hua. Fabrication of Subwavelength Metal Grating and Analysis with Vector Diffraction Theory[J]. Chinese Journal of Luminescence, 2013,34(7): 935-939
郑改革, 詹煜, 曹焜, 徐林华. 亚波长金属光栅结构的制备与矢量衍射理论分析[J]. 发光学报, 2013,34(7): 935-939 DOI： 10.3788/fgxb20133407.0935.

ZHENG Gai-ge, ZHAN Yu, CAO Kun, XU Lin-hua. Fabrication of Subwavelength Metal Grating and Analysis with Vector Diffraction Theory[J]. Chinese Journal of Luminescence, 2013,34(7): 935-939 DOI： 10.3788/fgxb20133407.0935.

摘要

利用纳米压印结合溅射和反应离子刻蚀工艺制备了周期为1 m、占空比为0.2的亚波长金属光栅

利用紫外-可见-近红外光谱仪测量了光栅的0级反射光谱。在严格耦合波分析的基础上

把光栅区域电磁场的空间谐波通过勒让德多项式展开

使用多项式展开的谱分析法求解常微分方程

计算了该亚波长金属光栅的反射光谱及磁场分布。实验测量结果同矢量衍射理论计算结果都显示

该光栅在近红外、中红外波段具有表面等离子体共振现象。数值计算结果还表明

对于此类亚波长金属光栅

当光栅的深宽比增加时

其反射光谱中会出现更多的反射谷。

Abstract

We fabricated a subwavelength metallic grating using nanoimprint technology and mea-sured the reflection spectrum using ultraviolet-visible-near-infrared spectrophotometer. Based on the theory of conventional rigorous coupled wave analysis

we used a new method to analyze the diffraction problems of subwavelength metallic gratings. We used fast Fourier factorization (FFF) method to derive the coupled wave equations

then each space harmonic can be expanded in terms of Legendre polynomials in grating region. Using this modified vector diffraction theory

we calculated the diffraction efficiency and the field distribution. All calculated results show great agreement with the experimental results.

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references

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