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Influence of H2 Carrier Gas on Epitaxy of AlN Buffer Layer
更新时间:2020-08-12
    • Influence of H2 Carrier Gas on Epitaxy of AlN Buffer Layer

    • Chinese Journal of Luminescence   Vol. 34, Issue 6, Pages: 776-781(2013)
    • DOI:10.3788/fgxb20133406.0776    

      CLC: O484
    • Received:25 March 2013

      Revised:22 April 2013

      Published:10 June 2013

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  • DENG Xu-guang, HAN Jun, XING Yan-hui, WANG Jia-xing, CUI Ming, CHEN Xiang, FAN Ya-ming, ZHU Jian-jun, ZHANG Bao-shun. Influence of H<sub>2</sub> Carrier Gas on Epitaxy of AlN Buffer Layer[J]. Chinese Journal of Luminescence, 2013,34(6): 776-781 DOI: 10.3788/fgxb20133406.0776.

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