SOI Multi-ring Cascade Optic Resonator Filters

WANG Xiao-qian; MA Ke-zhen; ZHAO Yu; FENG Xin-lin; XUE Chen-yang; ZHANG Wen-dong; YAN Shu-

doi:10.3788/fgxb20133405.0645

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SOI Multi-ring Cascade Optic Resonator Filters

更新时间：2020-08-12

- SOI Multi-ring Cascade Optic Resonator Filters
- Chinese Journal of Luminescence Vol. 34, Issue 5, Pages: 645-649(2013)
- 作者机构：
  
  1. 中北大学仪器科学与动态测试教育部重点实验室电子测试技术国家重点实验室,山西太原,030051
  2. 山西大学物理电子工程学院,山西太原,030006
- 作者简介：
- 基金信息：
- DOI：10.3788/fgxb20133405.0645
  CLC： O436
- Received：23 January 2013，
  
  Revised：16 March 2013，
  
  Published Online：22 March 2013，
  
  Published：10 May 2013
- 稿件说明：
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王晓倩, 马可贞, 赵宇, 冯薪霖, 薛晨阳, 张文栋, 闫树斌. SOI多环级联光学谐振腔滤波器[J]. 发光学报, 2013,34(5): 645-649

WANG Xiao-qian, MA Ke-zhen, ZHAO Yu, FENG Xin-lin, XUE Chen-yang, ZHANG Wen-dong, YAN Shu-bin. SOI Multi-ring Cascade Optic Resonator Filters[J]. Chinese Journal of Luminescence, 2013,34(5): 645-649
王晓倩, 马可贞, 赵宇, 冯薪霖, 薛晨阳, 张文栋, 闫树斌. SOI多环级联光学谐振腔滤波器[J]. 发光学报, 2013,34(5): 645-649 DOI： 10.3788/fgxb20133405.0645.

WANG Xiao-qian, MA Ke-zhen, ZHAO Yu, FENG Xin-lin, XUE Chen-yang, ZHANG Wen-dong, YAN Shu-bin. SOI Multi-ring Cascade Optic Resonator Filters[J]. Chinese Journal of Luminescence, 2013,34(5): 645-649 DOI： 10.3788/fgxb20133405.0645.

摘要

利用MEMS工艺制备了基于SOI的小尺寸、高集成光波导多环级联谐振腔滤波器

理论分析了多环级联微环腔的光场传输特性与光谱响应特性

实验验证并得到了不同级联环数与谐振谱线滚降垂直度的关系。研究表明:当波导宽度为450 nm、半径为5 m时

单环、双环和十环滤波器响应谱线的-3 dB带宽分别为0.313

0.279

0.239 nm

相应结果与理论吻合

即随着级联环数的增多

谐振谱线顶端趋于平坦

滚降垂直度增高。设计制备了环形与跑道形两种级联谐振腔滤波器

研究了相应的透射谱特性。

Abstract

Based on Silicon on insulator(SOI) material and mature Micro-electro-mechanical systems (MEMS) technology

an optical waveguide cascaded resonator filter with high integration and small size was processed. The light field transmission characteristics and spectral response characteristics of multi-ring cascaded cavity were theoretically analyzed. Moreover

the relationship between different number of cascaded micro-ring and resonance spectrum roll-off verticality was also proved in experiment. When the waveguide width is 450 nm and radius is 5 m

the experimental results show that -3 dB response bandwidth of the 1st order

2nd order and 10th order filters spectral are 0.313

0.279 and 0.239 nm

which are consistent with the theoretical results. That means more cascaded rings result in flatter top resonance and higher roll-off vertical degree. Micro-ring and racetrack-shaped cascaded resonator filters were fabricated and the properties of transmission spectrum was also tested.

关键词

Keywords

references

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