Transparent Conductive Properties of ZnO Thin Films Prepared by Electrochemical Deposition

SUN Fang-fang; HE Yun-qiu; LI Yi-ming; LI Le; CHU Xiao-fei; HUANG He-zhou

doi:10.3788/fgxb20133402.0218

您当前的位置：

首页 >

文章列表页 >

Transparent Conductive Properties of ZnO Thin Films Prepared by Electrochemical Deposition

paper | 更新时间：2020-08-12

- Transparent Conductive Properties of ZnO Thin Films Prepared by Electrochemical Deposition
- Chinese Journal of Luminescence Vol. 34, Issue 2, Pages: 218-224(2013)
- 作者机构：
  
  1. 同济大学材料科学与工程学院上海,201804
  2. 同济大学先进土木工程材料教育部重点实验室上海,200092
- 作者简介：
- 基金信息：
- DOI：10.3788/fgxb20133402.0218
  CLC： O642
- Received：11 December 2012，
  
  Revised：02 January 2013，
  
  Published：10 February 2013
- 稿件说明：
移动端阅览
孙芳芳, 贺蕴秋, 李一鸣, 李乐, 储晓菲, 黄河洲. 透明导电ZnO薄膜的电化学制备及性能研究[J]. 发光学报, 2013,34(2): 218-224

SUN Fang-fang, HE Yun-qiu, LI Yi-ming, LI Le, CHU Xiao-fei, HUANG He-zhou. Transparent Conductive Properties of ZnO Thin Films Prepared by Electrochemical Deposition[J]. Chinese Journal of Luminescence, 2013,34(2): 218-224
孙芳芳, 贺蕴秋, 李一鸣, 李乐, 储晓菲, 黄河洲. 透明导电ZnO薄膜的电化学制备及性能研究[J]. 发光学报, 2013,34(2): 218-224 DOI： 10.3788/fgxb20133402.0218.

SUN Fang-fang, HE Yun-qiu, LI Yi-ming, LI Le, CHU Xiao-fei, HUANG He-zhou. Transparent Conductive Properties of ZnO Thin Films Prepared by Electrochemical Deposition[J]. Chinese Journal of Luminescence, 2013,34(2): 218-224 DOI： 10.3788/fgxb20133402.0218.

摘要

以修饰的ITO玻璃为衬底

以不同浓度Zn(NO

)

O作为电解质溶液

采用阴极恒流沉积法制备了不同纳米结构的ZnO薄膜。用X射线衍射(XRD)、场发射扫描电镜(FE-SEM)、四探针仪(RTS-8)、紫外-可见(UV-Vis)光谱仪、循环伏安等分别表征薄膜的晶相、形貌和厚度、方块电阻、紫外-可见光透过率和氧化还原电位。结果表明:低浓度溶液沉积得到的

轴取向1D ZnO纳米柱和高浓度溶液沉积得到的致密2D六方ZnO纳米片在可见光范围(400~900 nm)的透过率均可高达85%以上

方块电阻约为14.5 /□。两种结构的氧化还原电位有显著区别

纳米柱的为－0.54 V(

vs.

SCE)

而纳米片的为－0.72 V(

vs.

SCE)

说明纳米片状的ZnO薄膜具有更为良好的化学稳定性。

Abstract

By using the constant-current electrochemical method

nanostructure ZnO was deposited on the modified ITO substrate. the relationship between Zn(NO

)

O concentration and the morphology

the crystalline phases

morphology and thickness

sheet resistances

transmittance

the oxidation and reduction potential were researched by XRD

FE-SEM

RTS-8

UV-Vis

Cyclic Voltammetry. The results indicated that one-dimensional(1D) nanopillars were prepared by low concentration of electrolyte

whereas two-dimensional(2D) nanodisks with compact hexagonal were obtainted by high concention of electrolyte. UV-Vis spectroscopy revealed that the transmittance of ZnO nanopillars and nanodisks were more than 85% at the range of 400~900 nm

RTS-8 analysis indicated that sheet resistances of ZnO thin films are about 14.5 /□

Cyclic Voltammetry analysis indicated significant differences of the potentials of oxidation and reduction between two kinds of morphology

whose ZnO nanopillars were －0.54 V(

vs.

SCE)and ZnO nanodisks were－0.72 V(

vs.

SCE)

respectively. The results revealed that ZnO thin films with nanodisks had better chemical stability.

关键词

Keywords

references

Kuo C H, Chang S J, Su Y K, et al. Nitride-based near-ultraviolet LEDs with an ITO transparent contact [J]. Mater. Sci. Eng. B, 2004, 106(1):69-72.[2] Li X, Liu H Y, Liu S, et al. InGaN based light emitting diodes with Ga doped ZnO as transparent conducting oxide [J]. Phys. Stat. Solidi. A, 2010, 207(8):1993-1996.[3] Kuo C H, Yeh C L, Chen P H, et al. Low operation voltage of nitride-based LEDs with Al-doped ZnO transparent contact layer [J]. Electrochem. Solid-State Lett., 2008, 11(9):H269-H271.[4] Qiao Q, Beck J, Lumpkin R, et al. A comparison of fluorine tin oxide and indium tin oxide as the transparent electrode for P3OT/TiO2 solar cells [J]. Sol. Energy Mater. Sol. Cells, 2006, 90(7/8):1034-1040.[5] Calnal S, Hüpkes J, Rech B, et al. High deposition rate aluminum-doped ZnO films with highly efficient light trapping for silicon thin film solar cells [J]. Thin Solid Films, 2008, 516(6):1242-1248.[6] Kumara G R A, Kaneko S, Konno A, et al. Large area dye-sensitized solar cells: Material aspects of fabrication [J].Prog. Photovolt.: Res. Appl., 2006, 14(7):643-651.[7] Hamberg I, Granqvist C G. Evaporated Sn-doped In2O3 films: Basic optical properties and applications to energy-efficient windows [J]. Appl. Phys., 1986, 60(11):R123-R126.[8] Mryasov O N, Freeman A J. Electronic band structure of indium tin oxide and criteria for transparent conducting behavior [J]. Phys. Rev. B, 2001, 64(23):233111-1-24.[9] Gao P X, Lao C S, Ding Y, et al. Metal/semiconductor core/shell nanodisks and nanotubes [J]. Adv. Funct. Mater., 2006, 16(1):53-62.[10] Zhang G, Adachi M, Ganjil S, et al. Vertically aligned single-crystal ZnO nanotubes grown on γ-LiAlO2(100) substrate by metalorganic chemical vapor deposition [J]. Appl. Phys., 2007, 46(29):L730-L732.[11] Lorenz M, Kaidashev E M, Rahm A, et al. MgxZn1-xO(0≤x＜0.2) nanowire arrays on sapphire grown by high-pressure pulsed-laser deposition [J]. Appl. Phys. Lett., 2005, 86(14):143113-1-3.[12] Wang C L, Mao B D, Wang E B, et al. Solution synthesis of ZnO nanotubes via a template-free hydrothermal route [J].Solid State Commun., 2007, 141(11):620-623.[13] Liu B, Zeng H C. Hydrothermal synthesis of ZnO nanorods in the diameter regime of 50 nm [J]. Am. Chem. Soc., 2003, 125(15):4430-4431.[14] Sun Y, Ndifor-Angwafor N G, Riley D J, et al. Synthesis and photoluminescence of ultra-thin ZnO nanowire/nanotube arrays formed by hydrothermal growth [J]. Chem. Phys. Lett., 2006, 431(4/5/6):352-357.[15] Kar A, Dev A, Chaudhuri S. Simple solvothermal route to synthesize ZnO nanosheets, nanonails, and well-aligned nanorod arrays [J]. Phys. Chem. B, 2006, 110(36):17848-17853.[16] Ayudhya S K N, Tonto P, Mekasuwandumrong O, et al. Solvothermal synthesis of ZnO with various aspect ratios using organic solvents [J]. Cryst. Growth Des., 2006, 6(11):2446-2450.[17] Santilli C V, Pulcinelli S H, Tokumoto M S, et al. In situ UV-Vis and EXAFS studies of ZnO quantum-sized nanocrystals and Zn-HDS formations from sol-gel route [J]. Eur. Ceramic Soc., 2007, 27(13/14/15):3691-3695.[18] Bhattacharyya P, Basu P K, Saha H, et al. Fast response methane sensor using nanocrystalline zinc oxide thin films derived by sol-gel method [J]. Sens. Actuators B: Chem., 2007, 124(1):62-67.[19] Peulon S, Lincot D. Cathodic electrodeposition from aqueous solution of dense or open-structure zinc oxide films [J]. Adv.Mater., 1996, 8(2):166-170.[20] Peng W Q, Qu S Q, Cong G W, et al. Synthesis and structures of morphology-controlled ZnO nano-and microcrystals [J]. Cryst. Growth Des., 2006, 6(6):1518-1522.[21] Cao B Q, Cai W P. From ZnO nanorods to nanoplates: Chemical bath deposition growth and surface-related emissions [J]. Phys. Chem. C, 2008, 112(3):680-685.[22] Izaki M, Omi T. Transparent zinc oxide films prepared by electrochemical reaction [J]. Appl. Phys. Lett., 1996, 68(17):2439-2340.[23] Pauporté T, Lincot D, Viana B, et al. Toward laser emission of epitaxial nanorod arrays of ZnO grown by electrodeposition [J]. Appl. Phys. Lett., 2006, 89(23):233112-1-3.[24] Anthony S P, Lee J I, Kim J K. Tuning optical band gap of vertically aligned ZnO nanowire arrays grown by homoepitaxial electrodeposition [J]. Appl. Phys. Lett., 2007, 90(10):103107-1-3.[25] Tena-Zaera R, Elias J, Wang G, et al. Role of chloride ions on electrochemical deposition of ZnO nanowire arrays from O2 reduction [J]. Phys. Chem. C, 2007, 111(45):16706-16711.[26] Cao B, Li Y, Duan G, et al. Growth of ZnO nanoneedle arrays with strong ultraviolet emissions by an electrochemical deposition method [J]. Cryst. Growth Des., 2006, 6(5):1091-1095.[27] Cao B, Teng X, Heo S H, et al. Different ZnO nanostructures fabricated by a seed-layer assisted electrochemical route and their photoluminescence and field emission properties [J]. Phys. Chem. C , 2007, 111(6):2470-2476.[28] Yang J H, Liu G M, Lu J, et al. Electrochemical route to the synthesis of ultrathin ZnO nanorod/nanobelt arrays on zinc substrate [J]. Appl. Phys. Lett., 2007, 90(10):103109-1-3.[29] Pradhan D, Leung K T. Vertical growth of two dimensional zinc oxide nanostructures on ITO-coated glass: Effects of deposition temperature and deposition time [J]. Phys. Chem. C, 2008, 112(5):1357-1364.[30] Pradhan D, Leung K T. Controlled growth of two-dimensional and one dimensional ZnO nanostructures on indium tin oxide coated glass by direct electrodeposition [J]. Langmuir, 2008, 24(17):9707-9716.[31] Pradhan D, Sindhwani S, Leung K T. Parametric study on dimensional control of ZnO nanowalls and nanowires by electrochemical deposition [J]. Nanoscale Res. Lett., 2010, 5(11):1727-1736.[32] Illy B N, Cruickshank A C, Schumann S, et al. Electrodeposition of ZnO layers for photovoltaic application: Controlling film thickness and orientation [J]. Mater. Chem., 2011, 21(34):12949-12957.

Views

286

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Effect of Sputtering Atmosphere on the Structure and Optical Properties of ZnO Thin Films by RF Reactive Magnetron Sputtering

Orientation-controlling Growth of Electrodeposited ZnO Films on Cathode

Improvement of the Structure and Photoelectrical Properties of ZnO Films Based on SiC Buffer Layer Grown on Si(111)

Effect of Annealing on Optical Properties of ZnO Thin Films

The Investigation of Growth Orientations of ZnO Films by CVD

Related Author

ZHAO Yong

CHENG C H

YANG Feng

LI Jing

ZHANG Yong

YOU Wei-guo

CAO Pei-jiang

LIU Wen-jun

Related Institution

西南交通大学超导研究开发中心材料先进技术教育部重点实验室

School of Materials Science and Engineering, University of New South Wales

深圳大学材料学院, 深圳市特种功能材料重点实验室

National Synchrotron Radiation Laboratory, University of Science and Technology of China

Department of Physics, University of Science and Technology of China

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176862 Email：fgxbt@126.com
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰