Ga-doped and P-doped ZnO Films Grown by MOCVD

YIN Wei; ZHANG Jin-xiang; CUI Xi-jun; ZHAO Wang; WANG Hui; SHI Zhi-feng; DONG Xin; ZHANG Ba

doi:10.3788/fgxb20133401.0082

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Ga-doped and P-doped ZnO Films Grown by MOCVD

Device Fabrication & Physics | 更新时间：2020-08-12

- Ga-doped and P-doped ZnO Films Grown by MOCVD
- Chinese Journal of Luminescence Vol. 34, Issue 1, Pages: 82-86(2013)
- 作者机构：
  
  集成光电子学国家重点联合实验室吉林大学电子科学与工程学院, 吉林长春 130012
- 作者简介：
- 基金信息：
- DOI：10.3788/fgxb20133401.0082
  CLC： O484.1
- Received：11 September 2012，
  
  Revised：01 November 2012，
  
  Published：10 January 2013
- 稿件说明：
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殷伟, 张金香, 崔夕军, 赵旺, 王辉, 史志峰, 董鑫, 张宝林, 杜国同. MOCVD法生长Ga、P掺杂的ZnO薄膜[J]. 发光学报, 2013,(1): 82-86

YIN Wei, ZHANG Jin-xiang, CUI Xi-jun, ZHAO Wang, WANG Hui, SHI Zhi-feng, DONG Xin, ZHANG Bao-lin, DU Guo-tong. Ga-doped and P-doped ZnO Films Grown by MOCVD[J]. Chinese Journal of Luminescence, 2013,(1): 82-86
殷伟, 张金香, 崔夕军, 赵旺, 王辉, 史志峰, 董鑫, 张宝林, 杜国同. MOCVD法生长Ga、P掺杂的ZnO薄膜[J]. 发光学报, 2013,(1): 82-86 DOI： 10.3788/fgxb20133401.0082.

YIN Wei, ZHANG Jin-xiang, CUI Xi-jun, ZHAO Wang, WANG Hui, SHI Zhi-feng, DONG Xin, ZHANG Bao-lin, DU Guo-tong. Ga-doped and P-doped ZnO Films Grown by MOCVD[J]. Chinese Journal of Luminescence, 2013,(1): 82-86 DOI： 10.3788/fgxb20133401.0082.

摘要

采用金属有机化学气相沉积法在蓝宝石衬底上制备Ga、P掺杂的ZnO薄膜

分别采用X射线衍射、扫描电子显微镜、霍尔效应测试、光致发光谱对样品进行表征。通过Ga、P掺杂分别得到n、p型ZnO薄膜

n型ZnO薄膜的载流子浓度可以达到1×10

-3

p型ZnO薄膜的载流子浓度达到1.66×10

-3

。所制备的ZnO薄膜具有

轴择优生长取向

并且p型ZnO薄膜具有较好的光致发光特性。

Abstract

Gallium-doped zinc oxide (ZnO:Ga) and phosphorus-doped zinc oxide (ZnO:P) films were separately prepared on Al

substrates by metal organic chemical vapor deposition (MOCVD) method. The microstructure

electrical and optical properties were studied by X-ray diffraction (XRD)

scanning electron microscopy

Hall effect measurement

the room temperature photoluminescence (PL) spectrum

respectively. The n-type ZnO films with a carrier concentration of 1×10

-3

and p-type films with carrier concentration of 1.66×10

-3

were obtained. SEM images showed the films had highly oriented columnar structure. PL spectrum displayed p-type ZnO films showed good optical qualities.

关键词

Keywords

references

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