The Optical and Electrical Properties of ZnO Films Grown on Flexible Substrate at Low Temperature by ALD

LI Xiao-ni; FANG Fang; FANG Xuan; CHEN Xin-ying; WEI Zhi-peng; LI Jin-hua; CHU Xue-ying; WA

doi:10.3788/fgxb20123311.1232

您当前的位置：

首页 >

文章列表页 >

The Optical and Electrical Properties of ZnO Films Grown on Flexible Substrate at Low Temperature by ALD

更新时间：2020-08-12

- The Optical and Electrical Properties of ZnO Films Grown on Flexible Substrate at Low Temperature by ALD
- Chinese Journal of Luminescence Vol. 33, Issue 11, Pages: 1232-1235(2012)
- 作者机构：
  
  长春理工大学理学院,吉林长春,130022
- 作者简介：
- 基金信息：
- DOI：10.3788/fgxb20123311.1232
  CLC： O484.4
- Received：08 June 2012，
  
  Revised：06 September 2012，
  
  Published：10 November 2012
- 稿件说明：
移动端阅览
李晓妮, 方芳, 方铉, 陈新颖, 魏志鹏, 李金华, 楚学影, 王晓华. 柔性衬底上ALD法低温制备的ZnO薄膜的光学和电学特性[J]. 发光学报, 2012,(11): 1232-1235

LI Xiao-ni, FANG Fang, FANG Xuan, CHEN Xin-ying, WEI Zhi-peng, LI Jin-hua, CHU Xue-ying, WANG Xiao-hua. The Optical and Electrical Properties of ZnO Films Grown on Flexible Substrate at Low Temperature by ALD[J]. Chinese Journal of Luminescence, 2012,(11): 1232-1235
李晓妮, 方芳, 方铉, 陈新颖, 魏志鹏, 李金华, 楚学影, 王晓华. 柔性衬底上ALD法低温制备的ZnO薄膜的光学和电学特性[J]. 发光学报, 2012,(11): 1232-1235 DOI： 10.3788/fgxb20123311.1232.

LI Xiao-ni, FANG Fang, FANG Xuan, CHEN Xin-ying, WEI Zhi-peng, LI Jin-hua, CHU Xue-ying, WANG Xiao-hua. The Optical and Electrical Properties of ZnO Films Grown on Flexible Substrate at Low Temperature by ALD[J]. Chinese Journal of Luminescence, 2012,(11): 1232-1235 DOI： 10.3788/fgxb20123311.1232.

摘要

以二乙基锌和水分别作为金属前驱体和反应物

利用原子层沉积方法(ALD)在柔性衬底上生长ZnO薄膜

讨论了生长温度对薄膜特性的影响。用AFM、XRD和HALL等对薄膜的表面形貌、晶体结构和电学性质进行表征

并且用PL光谱表征了其光学特性。实验结果表明

随着生长温度(低温下)的升高

薄膜的晶体质量和光学特性得到改善。当生长温度为170 ℃时

薄膜呈现良好的

轴择优取向

且具有较高的电子浓度(5.62×10

-3

)和电子迁移率(28.2 cm

·V

-1

·s

-1

)。

Abstract

ZnO films were grown on flexible substrate by the atomic layer deposition (ALD) using diethyl zinc (DEZn) as a metal precursor and water as a reactant. AFM

XRD and HALL effect were used to investigate the morphology

structural and electrical properties of the films. PL spectrum was measured for optical property. With the increasing temperature

the crystal quality and optical property of the films were improved. When grown at 170℃

the films exhibited

-axis orientation

the electron concentration was 5.62×10

and the electron mobility was 28.2 cm

·V

-1

·s

-1

关键词

Keywords

references

Look D C, Reynolds D C, Sizelove J R, et al. Electrical properties of bulk ZnO [J]. Solid State Commun., 1998,105(6):399-401.

Look D C, Reynolds D C, Litton C W, et al. Characterization of homoepitaxial p-type ZnO grown by molecular beam epitaxy [J]. Appl. Phys. Lett., 2002, 81(10):1830-1832.

Jiao S J, Zhang Z Z, Lu Y M, et al. ZnO p-n junction light-emitting diodes fabricated on sapphire substrates [J]. Appl. Phys. Lett., 2006, 88(3):031911-1-3.

Gao X Q, Guo Z Y, Zhang Y F, et al. The electronic structure and optical properties of Al-N codoped ZnO [J]. Chin. J. Lumin. (发光学报), 2010, 31(4):509-514 (in Chinese).

Sahu D R, Huang J L. High quality transparent conductive ZnO/Ag/ZnO multilayer films deposited at room temperature [J]. Thin Solid Films, 2006, 515(3):876-879.

Sahu D R, Lin S Y, Huang J L. ZnO/Ag/ZnO multilayer films for the application of a very low resistance transparent electrode [J]. Appl. Surf. Sci., 2006, 252(20):7509-7514.

Wang X, Gareg W P, Yee S. Monolithic thin-film metal-oxide gas-sensor arrays with application to monitoring of organic vapors [J]. Sensor Actuate B, 1995, 28(1):63-70.

Zdziecka E P, Wachnicki Ł, Paszkowicz W, et al. Photoluminescence, electrical and structural properties of ZnO films, grown by ALD at low temperature [J]. Semicond. Sci. Technol., 2009, 24(1):1-9.

Xu L, Liang H W, Liu Y D, et al. Cu-doped ZnO thin films prepared by metallorganic chemical vapor deposition [J]. Chin. J. Lumin.(发光学报), 2011, 32(9):956-961 (in Chinese).

Dong B Z, Fang G J, Wang J F, et al. Effect of thickness on structural, electrical, and optical properties of ZnO∶Al films deposited by pusled laser deposition [J]. J. Appl. Phys., 2007, 101(3):033713-1-7.

Liu F J, Hu Z F, Li Z J, et al. Surface acoustic wave based on ZnO thin films grown by RF-MBE [J]. Chin. J. Lumin.(发光学报), 2012, 33(3):328-333 (in Chinese).

Song H D, Kim Y J. Characterization of luminescent properties of ZnO∶Er thin films prepared by RF magnetron sputtering [J]. J.Eur. Ceram. Soc., 2007, 27(13-15):3745-3748.

Wang L D, Li Y, Chang C, et al. The adhesion strength study of ITO electric electrode improved by PI buffer layer on the flexible PET [J]. Chinese Sci. Bulletin, 2004, 49(24):2356-2539.

Views

111

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Smooth Surface Morphology of ZnO Thin Films on Sapphire at Low Temperature

Surface Modification of Thermoplastic Polyurethane Substrate and Its Application in Flexible OLEDs

Effects of Growth Parameters on Stimulated Emission Characteristics of AlGaN-based Deep Ultraviolet Multiple Quantum Wells on 4H-SiC Substrates

Responsivity Characteristics of ZnO Schottky Ultraviolet Photodetectors with High Gain

ZnO Luminescence Behavior Under Low Temperature by Ion-beam-induced Luminescence

Related Author

ZHAO Peng-cheng

ZHANG Zhen-zhong

YAO Bin

LI Bing-hui

WANG Shuang-peng

JIANG Ming-ming

ZHAO Dong-xu

SHAN Chong-xin

Related Institution

State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

University of Chinese Academy of Sciences, Bejing

Department of Physics, Jilin University

State Key Laboratory of Integrated Optoelectronics， Jilin University Region， College of Electronic Science and Engineering， Jilin University

College of Physics and Information Engineering， Quanzhou Normal University

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176862 Email：fgxbt@126.com
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰