Polarization Control of 980 nm High-power Vertical-cavity Surface-emitting Lasers by Using Sub-wavelength Metal-gratings

ZHANG Xiang-wei; NING Yong-qiang; QIN Li; LIU Yun; WANG Li-jun

doi:10.3788/fgxb20123309.1012

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Polarization Control of 980 nm High-power Vertical-cavity Surface-emitting Lasers by Using Sub-wavelength Metal-gratings

更新时间：2020-08-12

- Polarization Control of 980 nm High-power Vertical-cavity Surface-emitting Lasers by Using Sub-wavelength Metal-gratings
- Chinese Journal of Luminescence Vol. 33, Issue 9, Pages: 1012-1017(2012)
- 作者机构：
  
  1. 中国科学院研究生院北京,100039
  2. 发光学与应用国家重点实验室中国科学院长春光学精密机械与物理研究所,吉林长春,130033
- 作者简介：
- 基金信息：
- DOI：10.3788/fgxb20123309.1012
  CLC： TN248.4
- Received：08 May 2012，
  
  Revised：10 July 2012，
  
  Published：10 September 2012
- 稿件说明：
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张祥伟, 宁永强, 秦莉, 刘云, 王立军. 基于亚波长金属光栅的980 nm 高功率垂直腔面发射激光器偏振控制[J]. 发光学报, 2012,33(9): 1012-1017

ZHANG Xiang-wei, NING Yong-qiang, QIN Li, LIU Yun, WANG Li-jun. Polarization Control of 980 nm High-power Vertical-cavity Surface-emitting Lasers by Using Sub-wavelength Metal-gratings[J]. Chinese Journal of Luminescence, 2012,33(9): 1012-1017
张祥伟, 宁永强, 秦莉, 刘云, 王立军. 基于亚波长金属光栅的980 nm 高功率垂直腔面发射激光器偏振控制[J]. 发光学报, 2012,33(9): 1012-1017 DOI： 10.3788/fgxb20123309.1012.

ZHANG Xiang-wei, NING Yong-qiang, QIN Li, LIU Yun, WANG Li-jun. Polarization Control of 980 nm High-power Vertical-cavity Surface-emitting Lasers by Using Sub-wavelength Metal-gratings[J]. Chinese Journal of Luminescence, 2012,33(9): 1012-1017 DOI： 10.3788/fgxb20123309.1012.

摘要

利用制作在P-DBRs表面的亚波长金属光栅

在980 nm高功率底发射垂直腔面发射激光器有源区引入各向异性增益

达到了偏振控制的目的。本光栅基于等效介质理论和抗反射理论设计而成

光栅周期为186 nm

占空比为0.5。通过多物理场有限元分析软件对所设计的光栅进行了模拟分析

结果基本上符合设计要求。通过优化工艺步骤得到了较好的实验结果

550 μm孔径的VCSEL在正交方向上的偏振比为3

输出功率达到870 mW。

Abstract

The polarization control of vertical-cavity surface-emitting lasers with high power emission was demonstrated by using metal-grating to import non-isotropic gain. The grating with a period of 186 nm and a duty ratio of 0.5 which were calculated based on effective medium theory and antireflection theory. Then

it was simulated by multiphysics field of finite element analysis software

and the results correspond well with our design requirements. A polarization ratio of 3

an output power of 870 mW was demonstrated for a 550 μm aperture device.

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Keywords

references

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Related Author

ZHANG Xiang-wei

NING Yong-qiang

QIN Li

WANG Li-jun

LIU Yun

ZHANG Xiang-wei

QIN Li

LIU Yun

Related Institution

State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

University of Chinese Academy of Sciences, Beijing 100049, China

University of Chinese Academy of Sciences

Xi'an Technological University

State Key Laboratory of Luminescence and Applications， Changchun Institute of Optics， Fine Mechanics and Physics， Chinese Academy of Sciences

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