JIA Hui, CHEN Yi-ren, SUN Xiao-juan, LI Da-bing, SONG Hang, JIANG Hong, MIAO Guo-qing, LI Zhi-ming. Effect of SiO<sub>2</sub> Nanoparticles on Properties of <em>a</em>-AlGaN MSM UV Photodetectors[J]. Chinese Journal of Luminescence, 2012,33(8): 879-882
JIA Hui, CHEN Yi-ren, SUN Xiao-juan, LI Da-bing, SONG Hang, JIANG Hong, MIAO Guo-qing, LI Zhi-ming. Effect of SiO<sub>2</sub> Nanoparticles on Properties of <em>a</em>-AlGaN MSM UV Photodetectors[J]. Chinese Journal of Luminescence, 2012,33(8): 879-882 DOI: 10.3788/fgxb20123308.0879.
Effect of SiO2 Nanoparticles on Properties of a-AlGaN MSM UV Photodetectors
-AlGaN Metal-semiconductor-Metal (MSM)ultraviolet photodetector (UV-PD) was fabricated
and the effect of SiO
2
nanoparticles (SNPs) on its properties was investigated. It was shown that the dark current of the UV-PD with SNPs was more than one order of magnitude lower than that of without SNPs. The peak responsivity was enhanced more than two orders of magnitude after deposition of the SNPs. The SNPs on
a
-AlGaN MSM UV-PDs usually formed at the termination of screw and mixed dislocations
which acts a role of passivating the carrier transport paths. Surface-deposited SNPs make photogenerated electrons and holes collected easily in two separated contacts
which lead to a higher device property.
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references
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