JIA Hui, CHEN Yi-ren, SUN Xiao-juan, LI Da-bing, SONG Hang, JIANG Hong, MIAO Guo-qing, LI Zhi-ming. Effect of AlN Interlayer on <em>a</em>-plane AlGaN Grown by MOCVD[J]. Chinese Journal of Luminescence, 2012,(5): 519-524
JIA Hui, CHEN Yi-ren, SUN Xiao-juan, LI Da-bing, SONG Hang, JIANG Hong, MIAO Guo-qing, LI Zhi-ming. Effect of AlN Interlayer on <em>a</em>-plane AlGaN Grown by MOCVD[J]. Chinese Journal of Luminescence, 2012,(5): 519-524 DOI: 10.3788/fgxb20123305.0519.
Effect of AlN Interlayer on a-plane AlGaN Grown by MOCVD
The effect of AlN interlayer on strain states and its effect on optical properties of
a
-AlGaN epilayers grown by using metal organic chemical vapor deposition (MOCVD) method are investigated. The strain is characterized by the frequency shift based on Raman spectroscopy measurement. The results show that residual strain in
a
-AlGaN grown on the AlN interlayer is relaxed due to AlN interlayer act as a stable and compliant substrate induced weakening of mechanical strength. Accordingly
the near band edge emission (NBE) peak shows red shift in room temperature photoluminescence measurement. In addition
the introduction of AlN interlayer lead to the red shift of NBE photo-luminescence peaks
which can be contribute to the strain determined by Raman spectra.
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references
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