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DC Magnetron-sputtered VO2 Thin Films: Towards High-performance Near-infrared Photodetectors
Device Fabrication and Physics | 更新时间：2025-12-15

    • DC Magnetron-sputtered VO2 Thin Films: Towards High-performance Near-infrared Photodetectors

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    • “In the field of near-infrared photodetection, a monoclinic VO2 thin film was successfully prepared using a direct current magnetron sputtering metal vanadium target combined with annealing process. The MSM structured near-infrared photodetector exhibited excellent photoelectric response performance, providing a solution to the problem of photoelectric detection.”
    • Chinese Journal of Luminescence   Vol. 46, Issue 11, Pages: 2119-2128(2025)

    • DOI：10.37188/CJL.20250148    

      CLC： O482.31;O472. 3
    • CSTR：32170.14.CJL.20250148    

    • Received：13 May 2025，

      Revised：2025-05-20，

      Published：25 November 2025

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  • YANG Qi,ZENG Min,ZHOU Wenqi,et al.DC Magnetron-sputtered VO2 Thin Films: Towards High-performance Near-infrared Photodetectors[J].Chinese Journal of Luminescence,2025,46(11):2119-2128. DOI： 10.37188/CJL.20250148. CSTR： 32170.14.CJL.20250148.

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Related Author

YANG Qi
ZENG Ming
ZHOU Wen-qi
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LI Yue-bin
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Related Institution

Hubei Key Laboratory of Micro-Nanoelectronic Materials and Devices，Institute of Industrial Technology at Qianjiang，School of Microelectronics，Hubei University
State Key Laboratory of Integrated Optoelectronics， College of Electronic Science and Engineering， Jilin University
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College of Physics and Optoelectronics, Taiyuan University of Technology
College of Materials and Chemistry, China University of Geosciences
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