Ultraviolet Detector Based on ZnO/Diamond Film Heterojunction Diode

HUANG Jian; WANG Lin-jun; TANG Ke; ZHANG Ji-jun; XIA Yi-ben; LU Xiong-gang

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Ultraviolet Detector Based on ZnO/Diamond Film Heterojunction Diode

paper | 更新时间：2020-08-12

- Ultraviolet Detector Based on ZnO/Diamond Film Heterojunction Diode
- Chinese Journal of Luminescence Vol. 32, Issue 3, Pages: 272-276(2011)
- 作者机构：
  
  上海大学材料科学与工程学院, 上海 200072
- 作者简介：
- 基金信息：
- DOI：
  CLC： O472.3;TN315
- Received：01 October 2010，
  
  Revised：22 November 2010，
  
  Published Online：22 March 2011，
  
  Published：22 March 2011
- 稿件说明：
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黄健, 王林军, 唐可, 张继军, 夏义本, 鲁雄刚. 氧化锌/ 金刚石薄膜异质结紫外光探测器[J]. 发光学报, 2011,32(3): 272-276

HUANG Jian, WANG Lin-jun, TANG Ke, ZHANG Ji-jun, XIA Yi-ben, LU Xiong-gang. Ultraviolet Detector Based on ZnO/Diamond Film Heterojunction Diode[J]. Chinese Journal of Luminescence, 2011,32(3): 272-276
黄健, 王林军, 唐可, 张继军, 夏义本, 鲁雄刚. 氧化锌/ 金刚石薄膜异质结紫外光探测器[J]. 发光学报, 2011,32(3): 272-276 DOI：

HUANG Jian, WANG Lin-jun, TANG Ke, ZHANG Ji-jun, XIA Yi-ben, LU Xiong-gang. Ultraviolet Detector Based on ZnO/Diamond Film Heterojunction Diode[J]. Chinese Journal of Luminescence, 2011,32(3): 272-276 DOI：

摘要

采用射频磁控溅射法在p型自支撑金刚石衬底上制备了高度

轴取向的n型氧化锌薄膜。研究了不同的溅射功率对氧化锌薄膜质量的影响。通过半导体特性分析系统测试了氧化锌/金刚石异质结的电流-电压特性

结果显示该异质结二极管具有良好的整流特性

开启电压约为1.6 V。在此基础上制备了结型紫外光探测器

并对其光电性能进行了研究。结果表明

在施加反向偏压的条件下

该探测器对紫外光具有明显的光响应。

Abstract

Highly

-axis oriented n-type ZnO films were grown on the p-type fresstanding diamond(FSD) substrates by radio-frequency (RF) magnetron sputtering method. The effects of the sputtering power on the pro-perties of ZnO films were studied. Current-voltage (

I-V

) characteristics of the ZnO/diamond heterojunction were examined by a semiconductor characterization system and the results showed a distinct rectifying characteristics with a turn-on voltage of about 1.6 V. The ZnO/diamond heterojunction diode was also used for ultraviolet(UV) detector application and the detector showed a significant discrimination between the UV light and the visible light under reverse bias conditions.

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Keywords

references

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