Structural and Photoluminescence Analysis of Mn-doped ZnO thin Films

CHEN Xiang-cun; KANG Chao-yang; YANG Yuan-jun; XU Peng-shou; PAN Guo-qiang

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Structural and Photoluminescence Analysis of Mn-doped ZnO thin Films

paper | 更新时间：2020-08-12

- Structural and Photoluminescence Analysis of Mn-doped ZnO thin Films
- Chinese Journal of Luminescence Vol. 32, Issue 12, Pages: 1247-1250(2011)
- 作者机构：
  
  中国科学技术大学,安徽合肥,230026
- 作者简介：
- 基金信息：
- DOI：
  CLC： O482.31
- Received：22 June 2011，
  
  Revised：29 October 2011，
  
  Published Online：22 December 2011，
  
  Published：22 December 2011
- 稿件说明：
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陈香存, 康朝阳, 杨远俊, 徐彭寿, 潘国强. Mn掺杂对ZnO薄膜结构及发光性能的影响[J]. 发光学报, 2011,32(12): 1247-1250

CHEN Xiang-cun, KANG Chao-yang, YANG Yuan-jun, XU Peng-shou, PAN Guo-qiang. Structural and Photoluminescence Analysis of Mn-doped ZnO thin Films[J]. Chinese Journal of Luminescence, 2011,32(12): 1247-1250
陈香存, 康朝阳, 杨远俊, 徐彭寿, 潘国强. Mn掺杂对ZnO薄膜结构及发光性能的影响[J]. 发光学报, 2011,32(12): 1247-1250 DOI：

CHEN Xiang-cun, KANG Chao-yang, YANG Yuan-jun, XU Peng-shou, PAN Guo-qiang. Structural and Photoluminescence Analysis of Mn-doped ZnO thin Films[J]. Chinese Journal of Luminescence, 2011,32(12): 1247-1250 DOI：

摘要

利用脉冲激光沉积的方法在Si衬底上生长出了

轴高度取向的Mn掺杂ZnO薄膜。

射线衍射表明所有样品都具有纤锌矿结构

没有发现其它相

随着掺杂量的增加

轴晶格常数增大。原子力显微镜结果显示:Mn的掺杂引起了ZnO薄膜表面粗糙度的变化。由光致发光谱发现

在387 nm附近出现了由于近带边自由激子复合引起的紫外峰

还有以430和545 nm为中心的较宽发光峰

结果表明:掺入到ZnO薄膜中的Mn以＋2价的价态存在

掺Mn以后的ZnO薄膜带隙变大

缺陷能级也发生了改变

在发光谱中表现为紫外峰的蓝移

可见光部分430 nm和545 nm位置处发光峰的红移。

Abstract

O thin films were successfully grown on Si (111) substrates by pulsed laser deposition (PLD). X-ray diffraction measurement revealed that all the films were single phase and had wurtzite structure with

-axis orientation. As Mn concentration increased in Zn

O films

the

-axis lattice constant increased gradually. Atomic Force Microscopy (AFM) showed that surface roughness and morphology changed with doping concentrations. Photoluminescence spectra of Zn

O thin films were also studied which shows a narrow UV band at 387 nm

a broad blue band of 430 nm and another broad peak at 545 nm. It was deduced that Mn doping leads to a blue shift of the UV band

and a red shift of 430 nm and 545 nm.

关键词

Keywords

references

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