ZHOU Lu, WANG Yun-hua, JIA Bao-shan, BAI Duan-yuan, ZHANG Si-yu, QIAO Zhong-liang, GAO Xin, BO Bao-xue. Deposition of AlN Film for AR Coating of Semiconductor Lasers[J]. Chinese Journal of Luminescence, 2011,32(12): 1292-1296
ZHOU Lu, WANG Yun-hua, JIA Bao-shan, BAI Duan-yuan, ZHANG Si-yu, QIAO Zhong-liang, GAO Xin, BO Bao-xue. Deposition of AlN Film for AR Coating of Semiconductor Lasers[J]. Chinese Journal of Luminescence, 2011,32(12): 1292-1296DOI:
Deposition of AlN Film for AR Coating of Semiconductor Lasers
The relationship between output power and reflectance of the cavity surface was simulated. Simulation results showed that
when the reflectance of cavity surface coatings took the optimum value
the output power of the semiconductor lasers diode reached the maximum. AlN film were deposited on K9 glass substrates by magnetron sputtering using high-purity Al target and N
2
+Ar. The influence of sputtering conditions
including working pressure
nitrogen concentration
sputtering power on its deposition rate and optical properties has been studied. The optimized AlN coating was used in semiconductor lasers
we found that the COD threshold and the output power have been greatly improved.
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references
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