By using low-pressure metal-organic chemical vapor phase deposition(LP-MOCVD) technology

ZnO nanorods were grown with ZnO particles as catalyst on Si(111) substrate’s surface. X-ray diffraction (XRD)

Raman spectroscopy

scanning electron microscopy(SEM)

photoluminescence(PL) were used to characterize the crystalline quality

crystal structure

surface properties and optical properties of the ZnO nanorod samples. The results show that ZnO nanorods have a preferential

c

-axis orientation. Oxygen partial pressure was found to have important influence on the growth of ZnO nanorods. When oxygen partial pressure is low

the growth of ZnO is based on VLS growth mechanism;when oxygen partial pressure is high

the growth of ZnO is based on VS growth mechanism;ZnO growth can be optimized by changing the flow rate of N

2

O.Currently the use of MOCVD and ZnO catalyst for the growth of nano-ZnO arrays are less reported. The paper has enriched ZnO nanomaterials synthesizing methods

and the growth control mechanism was discussed.