FAN Zhi-qin, ZHANG Bing-lin, YAO Ning, LU Zhan-ling, YANG Shi-e, MA Bing-xian, DENG Ji-cai. Field Emission Properties of Carbon Nanotubes Films Grown on Patterned Ni Lines[J]. Chinese Journal of Luminescence, 2004,25(6): 743-747
FAN Zhi-qin, ZHANG Bing-lin, YAO Ning, LU Zhan-ling, YANG Shi-e, MA Bing-xian, DENG Ji-cai. Field Emission Properties of Carbon Nanotubes Films Grown on Patterned Ni Lines[J]. Chinese Journal of Luminescence, 2004,25(6): 743-747DOI:
Field Emission Properties of Carbon Nanotubes Films Grown on Patterned Ni Lines
Carbon nanotubes(CNTs) have attracted much attention because of their unique structure and properties since their discovery. One important potential application for the CNTs is as electron field emission sources in cold cathode flat panel displays as electron guns. Although a few of studies on the field emission properties of patterned aligned multi-wall nanotubes (MWNTs) were reported
the catalyst films were patterned by conventional photolithography and etching techniques. This method is too troublesome in application. In this paper
we prepared CNT patterns by a simple method
which is based on laser writing technology. Carbon nanotubes (CNTs) films were grown on patterned Ni lines coated substrate by microwave plasma chemical vapour deposition (MWPCVD). Ni films deposited on ceramics substrates by d.c. magnetron sputtering are used as catalysts for growing the CNTs. The ceramics substrates were mechanically polished using various grinding and polishing powders in order to uniform Ni film. Before growing CNTs
the Ni films were patterned to be lines by laser writing technology and then the CNTs were deposited on the catalyst patterns. The source gas for growing the CNTs was a mixture of H
2
and CH
4
. The gas flow rate of H
2
is 100 sccm
and the growth pressure was 6.5×10
3
Pa
various deposition times were applied to control the length of the carbon nanotubes. Scanning electron microscopy (SEM) was used to determine the morphology of carbon nanotubes. Raman spectroscopy was used to analyze the structure of carbon nanotubes. The field emission characteristics of the samples were measured by using a diode structure. The transparent anode was made of coating phosphor onto an ITO coated glass plate. The CNTsamples as the cathode were separated from the anode by a mica sheet with a suitable hole as the emission area. The gap between the anode and the cathode was 500 μm. The measurement was conducted under pressure of 3.6×10
-5
Pa. By varying process conditions such as Ni layer thickness
gas flow rate
deposition time
reactive temperature
the optimum conditions for field electron emission were found. When gas flow rate of CH
4
was 5 sccm
Ni film thickness was 150 nm
deposition time was 5 min
and reactive temperature was 700~800℃
the field emission properties are best. At this condition
all nanotubes are well aligned as characterized by SEM. Turn-on field of 1.3 V/μm
emission current density of 6.8 mA/cm
2
and field enhancement factor of 8477 were achieved.