High Quality ZnO Thin Films Grown by PECVD from Metal-Organic Zinc and Carbon Dioxide Mixture Gas Sources

CHU Zheng-sheng; LI Bing-sheng; LIU Yi-chun; SHEN De-zhen; FAN X W; LIU Yi-nan

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High Quality ZnO Thin Films Grown by PECVD from Metal-Organic Zinc and Carbon Dioxide Mixture Gas Sources

更新时间：2020-08-11

- High Quality ZnO Thin Films Grown by PECVD from Metal-Organic Zinc and Carbon Dioxide Mixture Gas Sources
- Chinese Journal of Luminescence Vol. 21, Issue 4, Pages: 383-384(2000)
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,130021
  2. 中国科学院激发态物理开放研究实验室,吉林长春,130021
- 作者简介：
- 基金信息：
- DOI：
  CLC： O482.3
- Received：08 November 2000，
  
  Published：30 November 2000
- 稿件说明：
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楚振生, 李炳生, 刘益春, 申德振, 范希武, 刘毅南. 用锌金属有机源和二氧化碳等离子体增强化学气相沉积的方法制备高质量氧化锌薄膜[J]. 发光学报, 2000,21(4): 383-384

CHU Zheng-sheng, LI Bing-sheng, LIU Yi-chun, SHEN De-zhen, FAN X W, LIU Yi-nan. High Quality ZnO Thin Films Grown by PECVD from Metal-Organic Zinc and Carbon Dioxide Mixture Gas Sources[J]. Chinese Journal of Luminescence, 2000,21(4): 383-384
楚振生, 李炳生, 刘益春, 申德振, 范希武, 刘毅南. 用锌金属有机源和二氧化碳等离子体增强化学气相沉积的方法制备高质量氧化锌薄膜[J]. 发光学报, 2000,21(4): 383-384 DOI：

CHU Zheng-sheng, LI Bing-sheng, LIU Yi-chun, SHEN De-zhen, FAN X W, LIU Yi-nan. High Quality ZnO Thin Films Grown by PECVD from Metal-Organic Zinc and Carbon Dioxide Mixture Gas Sources[J]. Chinese Journal of Luminescence, 2000,21(4): 383-384 DOI：

摘要

报道了用金属锌有机源和二氧化碳混合气源等离子体增强化学气相沉积(PECVD)的方法成功地制备高质量择优取向(0002)的ZnO薄膜。通过X-ray衍射谱进行了结构分析得到六方结构

择优取向

晶粒尺寸大约在220nm。并通过原子力显微镜分析更进一步验证了晶粒的尺寸。通过透射谱分析观察到了典型的激子吸收线。这种方法的特点是可以在低温条件下在任何衬底上生长大面积均匀性好、结晶度高的ZnO薄膜。

Abstract

High quality ZnO thin films were prepared by plasma enhanced chemical vapor deposition from the metal organic and carbon dioxide mixture gas sources.The wurtzite structure of ZnO thin films with a strong c axis orientation was successfully grown on the (001)Si substrate.The structure and composition were characterized by using X-ray diffraction and atomic force microscope(AFM)image.A type excition absorption line of ZnO was observed from optical transmission spectra.This method has a promise advantage in preparing high quality ZnO thin film.

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