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LUMINESCENCE FROM SILICON NITRIDE FILM BY LPCVD
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    • LUMINESCENCE FROM SILICON NITRIDE FILM BY LPCVD

    • Chinese Journal of Luminescence   Vol. 20, Issue 1, Pages: 37-39(1999)
    • Received:30 May 1998

      Published:28 February 1999

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  • Liu Yuzhen, Shi Wanquan, Liu Shixiang, Yao Decheng, Liu Jinlong, Han Yiqin, Zhao Lingli, Sun Baoyin, Ye Tianchun, Chen Mengzhen. LUMINESCENCE FROM SILICON NITRIDE FILM BY LPCVD[J]. Chinese Journal of Luminescence, 1999,20(1): 37-39 DOI:

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